12.07.2015 Views

Pneumatic Clean Series

Pneumatic Clean Series

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131 <strong>Clean</strong> <strong>Series</strong> Basic SpecificationsDischarges Particles Out ofThe <strong>Clean</strong> RoomAir Cylinder/Rotary Actuator/Air GripperAny external leakage is exhausted outside theclean room through the relief port.Prevents Particle GenerationCylinder with Guide/Rodless CylinderSpecial treatment on the guide and sliding partprevents grease scattering.Relief portSpecial treatmentSpecial treatmentActuatorRelief portSpecial treatmentSolenoidValveSolenoid ValveCommon exhaust mechanismallows air from the pilot valveto be exhausted outsidethe clean room.RegulatorBreathing air is exhaustedoutside the clean roomthrough the relief port.Reliefport<strong>Clean</strong> RegulatorExcellent corrosion resistance dueto use of stainless steel for all fluidcontact parts and electrolyticaluminum on external metal parts.Air LineEquipmentAir FilterDrainage is exhaustedoutside the clean roomthrough the drain guide.<strong>Clean</strong> Gas FilterThe PTFE membraneelement enablesprecision filtering.Drain guideFittings&Tubing<strong>Clean</strong> One-touch FittingsPrevents sliding and reduces particle generationby holding cushion and fixing packing. Blow typeis completely oil free and uses non-metal materialfor fluid contact areas.<strong>Clean</strong> TubingPolyolefine resinFront matter 11

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