Pneumatic Clean Series

Series SRPPrecision Clean Regulator668How to OrderSRP 11 0 101R01Set pressure0.005 to 0.2MPa0.01 to 0.4MPaGauge port orientationNil: StandardIN OUTHandleGauge portR: R specificationsSymbolM501Port sizePort sizeM5 X 0.8Rc1/8INGauge portOUT∗ The gauge port positionis indicated with theknob on top.Note) The pressure gauge is optional. Refer to option specifications on page 646.OptionDescriptionBracketModelB21-1-T1MaterialRolled steel plate(Electroless nickel plated)SpecificationsPort sizeFluidProof pressure MPaMax. operating pressure MPaSet pressure range Low pressure typeMPaHigh pressure typeAmbient and fluid temperature (°C)Fluid consumption l/min (ANR) Note 1)SensitivityRepeatabilityMetalResinWetted part materialRubberOtherAssembly environmentParts cleaningM5, Rc1/8Air, N2, CO2, Ar1.51.00.005 to 0.20.01 to 0.40 to 60 (With no condensation)0.5 or lessfull span0.3%full span±1%SUS316Fluoro resinFluoro rubberCeramicsClean room class 10000HCFC141b ultrasonic cleaning of all fluid contact partsNote 1) At set pressure of 0.2 MPa644