Pneumatic Clean Series

More documents

Recommendations

Info

Solenoid Valve 10-SY3000/5000328Series 10-SY5000 Dimensions10-SS5Y5-45- Stations B- C4C6C8Note) [ ]: For AC. < >: With surge voltage suppressor.L plug connectorM plug connectorStations n 2 3 4 5 6 7 8 9 10L1 135.5 148 160.5 185.5 198 210.5 223 248 260.5L2 125 137.5 150 175 187.5 200 212.5 237.5 250L3 102 118 134 150 166 182 198 214 230L4 16.5 15 13 17.5 16 14 12.5 17 15Stations n 11 12 13 14 15 16 17 18 19 20L1 273 285.5 310.5 323 335.5 360.5 373 385.5 398 423L2 262.5 275 300 312.5 325 350 362.5 375 387.5 412.5L3 246 262 278 294 310 326 342 358 374 390L4 13.5 11.5 16 14.5 12.5 17 15.5 13.5 12 16.5DirectionalControl ValveDIN terminal157.8145.272.6147159.6Pg.773.5MAX.10Applicable cable O.D.ø3.5 to ø783.494.7102.2309
Series 10-SYJ4/5 Port Solenoid ValveSeries SYJ3000329How to Order5 port(For type 20 manifold)Clean seriesActuation1 — 2 position single solenoid2 — 2 position double solenoid3 — 3 position closed center4 — 3 position exhaust center5 — 3 position pressure centerBody option3 — Common exhaust(Pilot and main valves)R port PE portRated voltage1 — 100VAC (50/60Hz)2 — 200VAC (50/60Hz)3 — 110VAC [115VAC] (50/60Hz)4 — 220VAC [230VAC] (50/60Hz)5 — 24VDC6 — 12VDCV — 6VDCS — 5VDCR — 3VDCBracketNil — Without bracketF — With bracketNote) In case of a doublesolenoid valve, thebracket is supplied,but not assembled. To order a doublesolenoid bracket foruse with a singlesolenoid valve,order the singlesolenoid valvewithout a bracketand order the doublesolenoid bracketseparately. Specifythe part number ofthe bracketVJ3000-13-1besides the partnumber of thesolenoid valve.[Example] 10-SYJ3123-5M-M3VJ3000-13-1Body Ported TypeBase Mounted Type(4 port)Base Mounted Type(5 port)10 - SYJ3 1 2 3 - 5 M - M3 -10 - SYJ3 2 3 3 - 5 M (For manifold use only)10 - SYJ3 2 4 3 - 5 M -4 port(31,S31,32,S32 manifold)5 port(sub-plate,41,S41,46,S46 manifold)Electrical entryGrommetG — Lead wire (300mm)H — Lead wire (600mm)L plug connectorL — With lead wire (300mm)LN — Without lead wireLO — Without connectorM plug connectorM — With lead wire (300mm)MN — Without lead wireMO — Without connector∗Types LN and MN include 2 sockets.Light/surge suppresserIf the electrical entry is G, H, L or M.Nil — Without light/surge suppresserS — With surge suppresserR — With surge suppresser (Non-polar type)Z — With light/surge suppresserU — With light/surge suppresser (Non-polar type)∗ Type "S" is not available with AC since it is integratedwith the rectifier.Manual overrideNil — Non-locking push typeD — Push-turn locking slotted typePort sizeNil — Without sub-plate(With gasket and screw)M5 — M5 port with sub-plateBe sure to read before handling. Refer to pages 7 to 16 of Front matter for safety instructions and commonprecautions for clean series and pages 236 to 238 for common precautions for directional control valve.310Caution
Page 1 and 2:
1SMC Corporation1-16-4 Shimbashi, M
Page 5 and 6:
5PageAir Line Equipment 431Flow Con
Page 7 and 8:
Air CylinderSeries CJ2Air CylinderS
Page 9 and 10:
9Safety InstructionsThese safety in
Page 11 and 12:
Clean Series/Common Precautions 2Be
Page 13 and 14:
131 Clean Series Basic Specificatio
Page 15 and 16:
153 How to Use Clean SeriesThe posi
Page 17 and 18:
174 Particle Generation Measuring M
Page 19 and 20:
Front matter 1819
Page 21 and 22:
21Actuator/Common Precautions 1Be s
Page 23 and 24:
23Actuator/Common Precautions 3Be s
Page 25 and 26:
25Auto Switch/Common Precautions 2B
Page 27 and 28:
SeriesHow to Order10-11-CJ2Air Cyli
Page 29 and 30:
øCAir Cylinder 10-CJ2/11-CJ229Basi
Page 31 and 32:
øCAir Cylinder 10-CJ2/11-CJ231Fron
Page 33 and 34:
SeriesHow to Order10-11-CJ2WDouble
Page 35 and 36:
øCAir Cylinder 10-CJ2W/11-CJ2W35Ba
Page 37 and 38:
SeriesHow to Order10-11-CJ2RADirect
Page 39 and 40:
SeriesHow to Order10-11-CM2Air Cyli
Page 41 and 42:
øIøIAir Cylinder 10-CM2/11-CM241B
Page 43 and 44:
Air Cylinder 10-CM2/11-CM243Axial F
Page 45 and 46:
Air Cylinder 10-CM2/11-CM245Rear Fl
Page 47 and 48:
10-11- SeriesCM2W Double Rod Cylind
Page 49 and 50:
øIAir Cylinder 10-CM2W/11-CM2W49Ba
Page 51 and 52:
Series10-11-CM2RDirect Mount Cylind
Page 53 and 54:
Air Cylinder 10-CM2R/11-CM2R53Speci
Page 55 and 56:
Series10-11-CG1Air Cylinderø20,ø2
Page 57 and 58:
0000Air Cylinder 10-CG1/11-CG157Bas
Page 59 and 60:
Air Cylinder 10-CG1/11-CG159Front F
Page 61 and 62:
SeriesHow to Order10-11-CG1WDouble
Page 63 and 64:
44Double Rod Cylinder 10-CG1W/11-CG
Page 65 and 66:
SeriesHow to Order10-11-Clean serie
Page 67 and 68:
SeriesHow to Order10-11-CUJMini Fre
Page 69 and 70:
Mini Free Mount Cylinder 10-CUJ/11-
Page 71 and 72:
SeriesHow to Order10-11-CUFree Moun
Page 73 and 74:
Free Mount Cylinder 10-CU/11-CU7310
Page 75 and 76:
SeriesHow to Order10-11-CQSCompact
Page 77 and 78:
Compact Cylinder 10-CQS/11-CQS77Sta
Page 79 and 80:
Compact Cylinder 10-CQS/11-CQS79Wit
Page 81 and 82:
Compact Cylinder 10-CQS/11-CQS81CQS
Page 83 and 84:
SeriesHow to Order10-11-CQ2Compact
Page 85 and 86:
Compact Cylinder 10-CQ2/11-CQ28510-
Page 87 and 88:
Compact Cylinder 10-CQ2/11-CQ28710-
Page 89 and 90:
Compact Cylinder 10-CQ2/11-CQ289Mou
Page 91 and 92:
Series10-CBM2How to OrderEnd Lock C
Page 93 and 94:
End Lock Cylinder 10-CBM293Basic (B
Page 95 and 96:
End Lock Cylinder 10-CBM295Rear Fla
Page 97 and 98:
SeriesHow to Order10-11-RECSine Cyl
Page 99 and 100:
Sine Cylinder 10-REC/11-REC99Dimens
Page 101 and 102:
Sine Cylinder 10-REC/11-REC101Speci
Page 103 and 104:
SeriesHow to Order11-12-CXSJDual Ro
Page 105 and 106:
Dual Rod Cylinder/Compact Type 11-C
Page 107 and 108:
SeriesHow to Order11-12-CXSLDual Ro
Page 109 and 110:
Dual Rod Cylinder 11-CXSL/12-CXSL10
Page 111 and 112:
Page 113 and 114:
Page 115 and 116:
Page 117 and 118:
SeriesHow to Order12-13-MGPLCompact
Page 119 and 120:
Compact Cylinder with Guide 12-MGPL
Page 121 and 122:
Series10-MGFHow to OrderGuide Table
Page 123 and 124:
Guide Table 10-MGF123Dimensions10-M
Page 125 and 126:
Series11-MXP/MXPJ6Air Slide Tableø
Page 127 and 128:
Air Slide Table 11-MXP/MXPJ6127Dime
Page 129 and 130:
Page 131 and 132:
Page 133 and 134:
Air Slide Table 11-MXP/MXPJ6133Made
Page 135 and 136:
Series13-MXQHow to OrderAir Slide T
Page 137 and 138:
Air Slide Table 13-MXQ137Dimensions
Page 139 and 140:
Page 141 and 142:
Page 143 and 144:
Page 145 and 146:
Page 147 and 148:
Page 149 and 150:
Page 151 and 152:
Page 153 and 154:
Page 155 and 156:
Page 157 and 158:
Page 159 and 160:
Page 161 and 162:
Air Slide Table 13-MXQ161Constructi
Page 163 and 164:
Series13-MXSAir Slide Tableø6, ø8
Page 165 and 166:
Air Slide Table 13-MXS165Dimensions
Page 167 and 168:
Page 169 and 170:
Page 171 and 172:
Page 173 and 174:
Page 175 and 176:
Page 177 and 178:
Page 179 and 180:
Page 181 and 182:
Page 183 and 184:
Air Slide Table 13-MXS183Constructi
Page 185 and 186:
SeriesCYPClean Rodless Cylinderø15
Page 187 and 188:
Clean Rodless Cylinder CYP187Dimens
Page 190 and 191:
190Actuator171
Page 192 and 193:
Rodless Cylinder 12-CY1B192Basic12-
Page 194 and 195:
WarningCaution12-CY1BDisassembly an
Page 196 and 197:
Magnetically Coupled Rodless Cylind
Page 198 and 199:
Sine Rodless Cylinder 12-REA198Dime
Page 200 and 201:
Low Speed Cylinder 10-CQSX/11-CQSX2
Page 202 and 203:
Low Speed Cylinder 10-CQ2X/11-CQ2X2
Page 204 and 205:
Low Speed Cylinder 10-CM2X/11-CM2X2
Page 206 and 207:
Clean seriesRotary Actuator206Vane
Page 208 and 209:
208Rotary Actuator/Common Precautio
Page 210 and 211:
210Rotary Actuator191
Page 212 and 213:
Rotary Actuator 10-CRB1212Specifica
Page 214 and 215:
4-R5Rotary Actuator 10-CRB1214Optio
Page 216 and 217:
Rotary Actuator 10-CRB1216Without A
Page 218 and 219:
ø45Rotary Actuator 10-CRB1218Witho
Page 220 and 221:
Vane Type Rotary Actuator 10-CRB122
Page 222 and 223:
Vane Type Rotary Actuator 10-CRB122
Page 224 and 225:
Rack Pinion Type Rotary Actuator 11
Page 226 and 227:
Page 228 and 229:
Page 230 and 231:
Rotary Table/Rack Pinion Type 11-MS
Page 232 and 233:
Clean seriesAir Gripper23211-MHZ2Pa
Page 234 and 235:
234Air Gripper/Common Precautions 2
Page 236 and 237:
Parallel Type Air Gripper 11-MHZ223
Page 238 and 239:
Standard/Series 11-MHZ2Finger Posit
Page 240 and 241:
Auto Switch SpecificationsRotary Ac
Page 242 and 243:
Rotary Actuated Air Gripper 11-MHR2
Page 244 and 245:
Page 246 and 247:
Auto Switch SpecificationsRotary Ac
Page 248 and 249:
Page 250 and 251:
Wide Opening Parallel Type Air Grip
Page 252 and 253:
Wide Opening Parallel Type Air Grip
Page 254 and 255:
Clean seriesDirectional Control Val
Page 256 and 257:
3/4/5 Port Solenoid Valve/Common Pr
Page 258 and 259:
258Flow Characteristics of Solenoid
Page 260 and 261:
Solenoid Valve 10-SZ3000260How to O
Page 262 and 263:
Solenoid Valve 10-SZ3000How to Orde
Page 264 and 265:
Solenoid Valve 10-SZ3000264Dimensio
Page 266 and 267:
Page 268 and 269:
Solenoid Valve 10-SZ3000Dimensions
Page 270 and 271:
ONO FSMCA4Solenoid Valve 10-SZ30002
Page 272 and 273:
Page 274 and 275:
5 Port Solenoid Valve Plug-in Type
Page 276 and 277:
5 Port Solenoid Valve Plug-in Type
Page 278 and 279: 5 Port Solenoid Valve Plug-in Type
Page 290 and 291: Solenoid Valve 10-SY3000/5000/70002
Page 294 and 295: 294Solenoid Valve 10-SY3000/5000/70
Page 300 and 301: 300DirectionalControl Valve281
Page 320 and 321: 320DirectionalControl Valve301
Page 322 and 323: Solenoid Valve 10-SY3000/5000322How
Page 324 and 325: Solenoid Valve 10-SY3000/5000324Man
Page 326 and 327: Solenoid Valve 10-SY3000/5000326Ser
Page 330 and 331: Solenoid Valve 10-SYJ3000330ModelVa
Page 332 and 333: Solenoid Valve 10-SYJ3000332Body Po
Page 334 and 335: Solenoid Valve 10-SYJ3000334Base Mo
Page 338 and 339: Solenoid Valve 10-SYJ3000338Flat Ri
Page 340 and 341: Solenoid Valve 10-SYJ3000340Type 20
Page 346 and 347: Solenoid Valve 10-SYJ5000346ModelBo
Page 348 and 349: Solenoid Valve 10-SYJ5000348Body Po
Page 354 and 355: Flat Ribbon Cable Type ManifoldSole
Page 364 and 365: Solenoid Valve 10-SY100364How to Or
Page 366 and 367: Solenoid Valve 10-SY100366Body Port
Page 368 and 369: Solenoid Valve 10-SY100368ManifoldH
Page 370 and 371: Solenoid Valve 10-SY100370Type S41
Page 372 and 373: Solenoid Valve 10-SYJ300372ModelFlo
Page 374 and 375: Approx.300Solenoid Valve 10-SYJ3003
Page 378 and 379:
Solenoid Valve 10-SYJ300378Type 42
Page 380 and 381:
Solenoid Valve 10-SYJ500380ModelFlo
Page 382 and 383:
Solenoid Valve 10-SYJ500382Base Mou
Page 384 and 385:
Page 386 and 387:
Page 388 and 389:
Solenoid Valve 10-VQ1000/2000388How
Page 390 and 391:
Page 392 and 393:
ModelSolenoid Valve 10-VQ1000/20003
Page 394 and 395:
Solenoid Valve 10-VQ1000/2000394F K
Page 396 and 397:
Solenoid Valve 10-VQ1000/2000396P K
Page 398 and 399:
Solenoid Valve 10-VQ1000/2000398S K
Page 400 and 401:
Page 402 and 403:
Solenoid Valve 10-VQ1000/2000402Mod
Page 404 and 405:
Page 406 and 407:
Page 408 and 409:
Page 410 and 411:
Page 412 and 413:
Page 414 and 415:
Solenoid Valve 10-VQ1000/2000414Dir
Page 416 and 417:
(A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25
Page 418 and 419:
Page 420 and 421:
Page 422 and 423:
Solenoid Valve 10-VQ1000/2000422F K
Page 424 and 425:
Page 426 and 427:
Solenoid Valve 10-VQ1000/2000426C K
Page 428 and 429:
Page 430 and 431:
Page 432 and 433:
Page 434 and 435:
Page 436 and 437:
Page 438 and 439:
Solenoid Valve 10-VQ100438JIS symbo
Page 440 and 441:
Solenoid Valve 10-VQ100440Dimension
Page 442 and 443:
Solenoid Valve 10-VQ100442Plug-in U
Page 444 and 445:
Solenoid Valve 10-VQ100444Plug Lead
Page 446 and 447:
446DirectionalControl Valve427
Page 448 and 449:
Solenoid Valve 10-VQD448DimensionsL
Page 450 and 451:
Clean SeriesAir Line Equipment450Fl
Page 452 and 453:
452Flow Control Equipment/Specific
Page 454 and 455:
454Clean Speed Controller with One-
Page 456 and 457:
456Air Line Equipment437
Page 458 and 459:
Speed Controller with One-touch Fit
Page 460 and 461:
Page 462 and 463:
462Speed Controller with One-touch
Page 464 and 465:
Page 466 and 467:
Page 468 and 469:
Page 470 and 471:
Dual Speed Controller with One-touc
Page 472 and 473:
Page 474 and 475:
Speed Controller for Low Speed Oper
Page 476 and 477:
Speed Controller for Low Speed Oper
Page 478 and 479:
Dual Speed Controller for Low Speed
Page 480 and 481:
Page 482 and 483:
Dual Speed Controller with One-touc
Page 484 and 485:
Page 486 and 487:
Speed Controller 10-AS486Needle Val
Page 488 and 489:
Speed Controller 10-AS488Needle Val
Page 490 and 491:
Page 492 and 493:
492Air Filter, Regulator/Common Pre
Page 494 and 495:
Air Filter 10-AF494Dimensions10-AF3
Page 496 and 497:
Page 498 and 499:
Mist Separator 10-AFM498Dimensions1
Page 500 and 501:
Micro Mist Separator 10-AFD500Dimen
Page 502 and 503:
Regulator 10-AR502Accessories (Opti
Page 504 and 505:
Regulator 10-AR504Dimensions10-AR40
Page 506 and 507:
506Regulator 10-ARSpecific Product
Page 508 and 509:
50Precision Direct Operated Regulat
Page 510 and 511:
50Regulator 10-AR510Dimensions10-AR
Page 512 and 513:
Regulator 10-AR512Specific Product
Page 514 and 515:
50Filter Regulator 10-AW514Dimensio
Page 516 and 517:
Filter Regulator 10-AW516Specific P
Page 518 and 519:
Mist Separator Regulator 10-AWM518D
Page 520 and 521:
Page 522 and 523:
Micro Mist Separator Regulator 10-A
Page 524 and 525:
Page 526 and 527:
Precision Regulator 10-IR1000/2000/
Page 528 and 529:
OUTPrecision Regulator 10-IR1000/20
Page 530 and 531:
Page 532 and 533:
Fittings & Tube/Common Precautions
Page 534 and 535:
DimensionsClean One-touch Fittings
Page 536 and 537:
Clean One-touch Fittings KP536Speci
Page 538 and 539:
Page 540 and 541:
DimensionsMale connector: KPQH, KPG
Page 542 and 543:
DimensionsElbow: KPQL, KPGL——
Page 544 and 545:
Miniature One-touch Fittings 10-KJ5
Page 546 and 547:
Page 548 and 549:
Page 550 and 551:
Page 552 and 553:
One-touch Fittings 10-KQ552ModelHex
Page 554 and 555:
One-touch Fittings 10-KQ554Male Con
Page 556 and 557:
One-touch Fittings 10-KQ556Male Bra
Page 558 and 559:
One-touch Fittings 10-KQ558Universa
Page 560 and 561:
One-touch Fittings 10-KQ560Double B
Page 562 and 563:
One-touch Fittings 10-KQ562Extended
Page 564 and 565:
One-touch Fittings 10-KQ564Differen
Page 566 and 567:
One-touch Fittings 10-KQ566Double B
Page 568 and 569:
One-touch Fittings 10-KQ568Plug-in
Page 570 and 571:
Page 572 and 573:
One-touch Fittings Stainless Specif
Page 574 and 575:
Page 576 and 577:
Page 578 and 579:
Page 580 and 581:
Page 582 and 583:
Page 584 and 585:
Insert Fittings 10-KF584ModelMale C
Page 586 and 587:
Insert Fittings 10-KF586Bulkhead Fe
Page 588 and 589:
Insert Fittings 10-KF588Swivel Elbo
Page 590 and 591:
Miniature Fittings 10-M590Series Mo
Page 592 and 593:
Miniature Fittings 10-M592Series M5
Page 594 and 595:
Miniature Fittings 10-M594Series M5
Page 596 and 597:
Stainless Miniature Fittings 10-MS5
Page 598 and 599:
Stainless Miniature Fittings 10-MS5
Page 600 and 601:
Rectangular Multi-connector 10-KDM6
Page 602 and 603:
Rectangular Multi-connector 10-KDM6
Page 604 and 605:
Series TPSClean TubingSoft Polyolef
Page 606 and 607:
606Series 10-TCU Polyurethane Coil
Page 608 and 609:
Clean seriesAir Preparation Equipme
Page 610 and 611:
610Air Preparation Equipment/Common
Page 612 and 613:
Mist Separator 10-AM59310-AM150 to
Page 614 and 615:
614Mist Separator 10-AMSpecific Pro
Page 616 and 617:
Micro Mist Separator 10-AMD59710-AM
Page 618 and 619:
Micro Mist Separator 10-AMD618Speci
Page 620 and 621:
601Super Mist Separator 10-AMEDimen
Page 622 and 623:
Super Mist Separator 10-AME622Speci
Page 624 and 625:
605Odor Removal Filter 10-AMFDimens
Page 626 and 627:
Odor Removal Filter 10-AMF626Specif
Page 628 and 629:
DimensionsHollow Fiber Membrane Air
Page 630 and 631:
Exhaust Cleaner for Clean Room AMPD
Page 632 and 633:
Exhaust Cleaner for Clean Room AMP6
Page 634 and 635:
Clean SeriesPressure Switch63410-PS
Page 636 and 637:
636Pressure Switch (Solid State Typ
Page 638 and 639:
Digital Pressure Switch 10-PSE638Di
Page 640 and 641:
Page 642 and 643:
Page 644 and 645:
644Pressure Switch625
Page 646 and 647:
High Precision Digital Pressure Swi
Page 648 and 649:
High Precision Digital Pressure Swi
Page 650 and 651:
Page 652 and 653:
Digital Pressure Switch with Backli
Page 654 and 655:
Page 656 and 657:
Digital Pressure Switch with Backli
Page 658 and 659:
Clean SeriesClean Regulator658Clean
Page 660 and 661:
Series SRH660Flow Rate Characterist
Page 662 and 663:
Series SRH662ConstructionParts list
Page 664 and 665:
Series SRH664OptionsPressure GaugeP
Page 666 and 667:
666Series SRHSafety InstructionsThe
Page 668 and 669:
Series SRPPrecision Clean Regulator
Page 670 and 671:
Precision Clean Regulator SRP670Opt
Page 672 and 673:
648672
Page 674 and 675:
674Series SFClean Gas Filter/Strain
Page 676 and 677:
Clean Gas Filter SF676Cartridge Typ
Page 678 and 679:
Clean Gas Filter SF678Disposable Ty
Page 680 and 681:
Clean Gas Filter SF680Disposable Ty
Page 682 and 683:
Clean Gas Filter SFSpecific Product
Page 684 and 685:
660684
Page 686 and 687:
686F.R. Unit Precautions 1Be sure t
Page 688 and 689:
688F.R. Unit Precautions 3Be sure t
Page 690 and 691:
OUTAir Filter 10-AF690Dimensions10-
Page 692 and 693:
OUTMist Separator 10-AFM692Dimensio
Page 694 and 695:
OUTDimensions10-AFD20 10-AFD30 to 4
Page 696 and 697:
Regulator 10-AR696Dimensions10-AR20
Page 698 and 699:
Regulator: Modular Type with Back F
Page 700 and 701:
QOUTFilter Regulator 10-AW700Dimens
Page 702 and 703:
QOUT702Filter Regulator with Back F
Page 704 and 705:
OUTMist Separator Regulator 10-AWM7
Page 706 and 707:
OUTMicro-Mist Separator Regulator 1
Page 708 and 709:
708Alphabet IndexProduct Series Ind
Page 710 and 711:
710K10-KF10-KG10-KJ10-KQPageInsert
Page 712 and 713:
memo712
Page 714 and 715:
memo714
show all

Pneumatic Clean Series

Create successful ePaper yourself

Delete template?

Save as template?