Pneumatic Clean Series

Rotary Actuator 187+1.40How to SearchThree types of search methods are available so that the desiredproduct can be found quickly as well as easily.61 How to Search from Clean Series Total Index (Product Name)Clean Series Total IndexFront matter 2Clean Series Total IndexPagePrior to Use ······························· Front matter 1/Supplement 1Index Guide ··················································· Front matter 1Clean Series Total Index ··································· Front matter 2/3How to Search ·············································· Front matter 4/5Safety Instructions ············································ Front matter 7Clean Series/Common Precautions ···················· Front matter 8 to 10Clean Series Basic Specifications ························· Front matter 11System Circuit in Clean Room ··························· Front matter 12/13How to Use Clean Series ··································· Front matter 14Particle Generation Measuring Method ···················· Front matter 16Index Guide ················································· Front matter 17Product Series Index (Alphabetical order) ··············· Supplement 1 to 3Actuator 1Actuator/Common Precautions ··························································· 2Auto Switch/Common Precautions ························································· 5Basic SeriesAir Cylinder CJ2/CJ2W/CJ2RA ·························· 8Air Cylinder CM2/CM2W/CM2R ························· 20Air Cylinder CG1/CG1W/CG1R ·························· 36Mini Free Mount Cylinder CUJ ········································· 48Free Mount Cylinder CU ·········································· 52Compact Cylinder CQS ········································· 56Compact Cylinder CQ2 ········································· 64End Lock Cylinder 10-CBM2 ······································ 72Sine Cylinder REC ········································· 78Cylinder With GuideDual Rod Cylinder/Compact Type CXSJ ········································ 84Dual Rod Cylinder CXSL ········································ 88Compact Cylinder With Guide MGPL ······································· 98Guide Table 10-MGF ······································· 102Air Slide TableAir Slide Table 11-MXP/11-MXPJ6 ··························· 106Air Slide Table 13-MXQ ······································· 116Air Slide Table 13-MXS ······································· 144Rodless CylinderClean Rodless Cylinder CYP ··········································· 166Magnetically Coupled Rodless Cylinder 12-CY1B ······································ 172Magnetically Coupled Rodless Cylinder (Direct Mount Type) 12-CY1R ······································ 176Sine Rodless Cylinder 12-REA ······································· 178Low Speed CylinderLow Speed Cylinder CQSX ······································· 180Low Speed Cylinder CQ2X ······································· 182Low Speed Cylinder CM2X ······································· 184Rotary Actuator/Common Precautions ························································ 188Vane Style Rotary Actuator 10-CRB1 ······································ 192Rack Pinion Style Rotary Actuator 11-CRA1 ······································ 204Rotary Table/Rack Pinion Style 11-MSQ ······································· 210Air Gripper 213Air Gripper/Common Precautions ······················································· 214Air Gripper 11-MHZ2 ······································ 216Rotary Actuated Air Gripper 2 Finger Type 11-MHR2 ····································· 220Rotary Actuated Air Gripper 3 Finger Type 11-MHR3 ····································· 226Wide Opening Air Gripper Parallel Style 11-MHL2 ····································· 230Directional Control Valve 2353/4/5 Port Solenoid Valve/Common Precautions ·················································· 2365 Port Solenoid Valve 10-SZ3000 ···································· 2405 Port Solenoid Valve 10-SQ1000/2000 ····························· 2544/5 Port Solenoid Valve 10-SY3000/5000/7000 ························ 2704/5 Port Solenoid Valve 10-SYJ3000/5000 ···························· 3103 Port Solenoid Valve 10-SY100 ····································· 3443 Port Solenoid Valve 10-SYJ300/500 ······························· 3525 Port Solenoid Valve 10-VQ1000/2000 ····························· 3683 Port Solenoid Valve 10-VQ100 ····································· 4184 Port Solenoid Valve 10-VQD1000 ·································· 428Series10-Air Cylinder Series 11-CM2/CM2W/CM2R 2010-11-10-11-10-11-10-11-10-11-10-11-10-11-10-11-11-12-11-12-12-13-10-11-10-11-10-11-10-11-Main TextCM2How to OrderClean series10 — Relief type11 — Vacuum suction typeBuilt-in magnetNil — NoD — With auto switch(Built-in magnet)MountingB — BasicL — Axial footF — Front flangeG — Rear flangeBZ — Boss-cut basicFZ — Boss-cut front flangeBore size (mm)Air Cylinder/ø20,ø25,ø32,ø4010 - C D M 2 L 40 - 150 A - C73Cylinder stroke (mm)CushionNil — Rubber bumperA — Air cushionModelType of auto switchReed switchC73Solid state switchH7BH7A1Number of auto switchesNil — 2S — 1n — nVacuum Reliefsuction type typeModel10-CM22010-CM22510-CM23210-CM24011-CM22011-CM22511-CM23211-CM240Bore size PortStandard strokeLubrication Action(mm) size(mm)2025 Rc1/83240 Rc1/4Double acting 25, 50, 75, 100, 125,Non-lube20single rod150, 175, 200, 250, 30025 Rc1/83240 Rc1/4Auto switchmountingAvailableCushionRubber AirAvailable AvailableSpecificationsBore size (mm)ItemProof pressureMax. operating pressureMin. operating pressureAmbient and fluid temperaturePiston speedStroke length toleranceMounting20,25,32,401.5MPa1.0MPa0.05MPaWithout auto switch : –10°C to 70°C, With auto switch: –10°C to 60°C (With no condensation)30 to 400mm/sBasic,Axial foot,Front flange,Rear flange20Front matter 4