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Molecular beam epitaxial growth of III-V semiconductor ... - KOBRA

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Introduction<br />

1.2 Thesis Outline<br />

The structure <strong>of</strong> the thesis is constructed as follows:<br />

• Chapter 1 is the introduction to the research work status, challenges, the<br />

scientic objectives <strong>of</strong> current project (Monalisa) and thesis approach, with<br />

a complete overview <strong>of</strong> the thesis structure.<br />

• Chapter 2 serves as an introduction to fundamental physics <strong>of</strong> low dimensional<br />

systems (nanostructures), including the motivation to use silicon in<br />

this research work.<br />

• Chapter 3 discusses the main concepts <strong>of</strong> epitaxy and challenges <strong>of</strong> the heteroeptiaxial<br />

<strong>growth</strong> <strong>of</strong> the <strong>III</strong>-V quantum dots (QDs) on silicon substrate,<br />

including the basics physics <strong>of</strong> the planar defects (micro twins (MTs), mist<br />

dislocations (MDs) and stacking faults (SFs), etc.) associated to polar on<br />

non-polar epitaxy.<br />

• Chapter 4 deals with the <strong>growth</strong> and characterization techniques used to<br />

produce all the results reported in this research work, which serve as a reference<br />

to better interpret and understand <strong>of</strong> the experimental investigations.<br />

• Chapter 5 provides a detail study <strong>of</strong> the <strong>growth</strong> and characterization <strong>of</strong><br />

InAs and InGaAs QDs embedded in Si matrix, including the surface preparation<br />

treatment prior to the MBE epitaxy.<br />

• Chapter 6 focusses on the <strong>growth</strong> and characterization <strong>of</strong> InAs and InGaAs<br />

QDs embedded in GaAs matrix on both at and pre-patterned Si substrates.<br />

• Chapter 7 introduces the optimization <strong>of</strong> GaP buer layer <strong>growth</strong> on at<br />

Si substrate using dierent <strong>growth</strong> modes like MEE and MBE.<br />

• Chapter 8 concludes the results <strong>of</strong> the present thesis and gives outlook for<br />

the future work.<br />

6

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