xxiii πανελληνιο ÏƒÏ Î½ÎµÎ´ÏÎ¹Î¿ Ï†Ï ÏƒÎ¹ÎºÎ·Ï‚ στερεας καταστασης & επιστημης ...

the deposited film in relation to the target material. The latter is ZrO 2 stabilized by 8 wt.% Y 2 O 3 in the form of lumps, ~2mm
in diameter.
The growth rate has been proportional to the electron gun power and for our purposes it has ranged from 5 to 25
Å/sec. However, the deposition process is unstable and takes a lot of effort to keep the rate limited. Films deposited at lower
rates presented better adhesion and uniformity, while films created at higher rates exhibited abnormalities. Different types of
substrates were chosen in order to understand the influence of substrate material and structure on the film growth process. As
seen in Fig. 2 the films possess the property of uniformity, as stated earlier. Only when we examine the film in the nanoscale
region do we observe some texture, which consists of granules in the size of ~50nm. While observing the cross section of the
film we observe typical columnar structures [7].
Conclusion
Figure 2. SEM Images of Film on K-glass and NiO-YSZ
Vacuum deposition with the e-beam technique is suitable for preparing thin YSZ films on various substrates. This
technique provides high deposition rates and the ability to control the film’s morphology. Depending on the deposition
parameters, the films have a packing density ranging between 0.6 and 0.9 and a crystallity size of 40 – 70 nm. The deposition
process is difficult to control; however, the adhesion of the film on the substrate and the homogeneity it presented was
satisfactory.
Acknowledgement
The authors wish to thank the European Social Fund (ESF), Operational Program for
Educational and Vocational Training, and particularly the Program (PENED 2003), for partial
funding of this work.
ΓΕΝΙΚΗ ΓΡΑΜΜΑΤΕΙΑ ΕΡΕΥΝΑΣ ΚΑΙ ΤΕΧΝΟΛΟΓΙΑΣ
«ΠΡΟΓΡΑΜΜΑ ΕΝΙΣΧΥΣΗΣ ΤΟΥ ΕΡΕΥΝΗΤΙΚΟΥ ΔΥΝΑΜΙΚΟΥ (ΠΕΝΕΔ) 2003»
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