Metallorganisch chemische ... - JUWEL - Forschungszentrum Jülich

10 Literaturverzeichnis
10.1 Literaturverzeichnis
[1] A.I. Kingon, J.P. Maria, S.K. Streiffer Nature, 406 (2000) p.1032, 2000
[2] ITRS, International Technology Roadmap for Semiconductors
[3] G.D. Wilk, R.M. Wallace, J.M. Anthony, J. Appl. Phys. 89/10 (2001) p.5243-5275
[4] R.H. Dennard, United States Patent 3387286, July 14, 1967
[5] T. Morihara, Y. Ohno, T. Eimori et. al., Jpn. J. Appl. Phys. 33 (1994) p.4570
[6] Kim, K.N.; Lee, J.Y.; Lee, K.H, et. al., Proc. on VLSI Technology (1997) p.9
[7] D.E. Koteki, J.D. Baniecki, H. Shen et al., IBM J. Res. Dev. 43-3, 367 (1999)
[8] A. Tombak et. al., IEEE Microwave Wirel. Com. Let. 12 (2002) p. 3-5
[9] F. Zimmermann, M. Voigst, C. Weil, R. Jakoby, P. Wang, W. Menesklou, E.Ivers-
Tiffée, J. Europ. Cer. Soc. 21 (2001) 2019-2023
[10] C. Basceri, S.K. Streiffer, A.I. Kingon and R. Waser, J. Appl. Phys., vol. 82 (1997) p.
2497-2504,
[11] Y. Imanaka, T. Shioga, J.D. Baniecki, Fujitsu Sci. Tech. J., 38/1 (2002) p.22-30
[12] Erfahrungsaustausch mit AIXTRON AG (2003)
[13] M.J. Crosbie, P.J. Wright, H.O. Davis, A.C. Jones, et. al., Chem. Vap. Dep. 5 (1999)
p. 9-12
[14] R. Waser: Nanoelectronics and Information Technology, Wiley-VCH (2003), Kap.
13, Seite 364
[15] F. Fitsilis, Dissertation, Aachen, RWTH 2002, ISSN 0944-2952
[16] R.D. Shannon, J. Appl. Phys. 73, 348 (1993)
[17] L.L. Hench and J.K. West, `Principles of Electronic Ceramics`, Wiley & Sons, 1990
[18] F.S. Galasso: Perovskites and High-Tc-Superconductors, Gordon and Breach
Sci.Publ., NY (1990)
[19] Y. Xu: Ferroelectric materials and their application, 1991, North-Holland Publ.
[20] G. Arlt: Werkstoffe der Elektrotechnik, Vorlesungsmanuskript, RWTH Aachen
(1989)
[21] D. Richter in Neue Materialien für die Informationstechnik, Ferienschule (2001) Forschungszentrum
Jülich GmbH
[22] M. Itoh et.al., Phys. Rev. Letters, 82/17 (1999) p.3540-3543
[23] T. Yagi et. al., Physika B 316-317 (2002) 596-599
[24] G.A. Smolenskii, K.I. Rozgechev (1954) aus Landolt-Börnstein: Ferroelectric Oxides,
III/16a, New Series, Springer Verlag, Berlin (1981)
[25] G. Arlt, D. Hennings, G. de With, J. Appl. Phys. 58 (1985) p.1619-1625
[26] M.H. Frey, L. Xu, P. Han, D.A. Payne, Ferroelectrics 206/207 (1998) p. 337-353