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PANEL DISCUSSION TEXTILE MICROSYSTEMS ...................................................................................137 PiezoeleCTriC Charging for sMarT faBriC aPPliCaTions ........................................................................138 R. Hackworth , J. R. Moriera, R. Maxwell, R. Kotha, A.A. Ayon MeTer-sCale surfaCe CaPaCiTive TyPe of TouCh sensors faBriCaTed By weaving ConduCTive-PolyMer-CoaTed fiBers ................................................................142 Seiichi Takamatsu, Takeshi Kobayashi, Nobuhisa Shibayama, Koji Miyake, Toshihiro Itoh POSTER INTRODUCTION SESSION on-wafer-PaCkaging of CrysTal quarTz Based devises using low-TeMPeraTure anodiC Bonding . .....................................................................................148 Y. Zimin, T. Ueda a novel self-Powered MeThod for PiPe flow Measuring .......................................................................152 Song Hao Wang, Ronald Garcia, Pei Hua Chang a MiCrofluidiC ChiP wiTh single-ParTiCle-Based arrays using eleCTroosMoTiC flow . ...............157 Chun-Ping Jen, Ju-Hsiu Hsiao a novel full range vaCuuM Pressure sensing TeChnique using free daMPing deCay of MiCro-Paddle CanTilever BeaM defleCTed By eleCTrosTaTiC forCe . ...........................................160 Guan-Lan Chen, Chi-Jia Tong, Ya-Chi Cheng, Yu-Ting Wang, Ming-Tzer Lin design and develoPMenT of viBraTional MeChanoeleCTriCal MeMs TransduCer for MiCroPower generaTion . ............................................................................................................................164 Rolanas Dauksevicius, Genadijus Kulvietis, Vytautas Ostasevicius, Ieva Milasauskaite inTerfaCial ConfiguraTions and Mixing PerforManCes of fluids in sTaggered Curved-Channel MiCroMixers ..............................................................................................170 Jyh Jian Chen, Chun Huei Chen, Shian Ruei Shie MiCro ProBe array faBriCaTion By using The MiCrolens array Mask Through ProxiMiTy PrinTing . ............................................................................................................................176 Tsung-Hung Lin, Hsiharng Yang, Ching-Kong Chao CresCenT shaPed alignMenT Marks aPPliCaBle To self-alignMenT of MiCro-ParTs wiTh and wiThouT PosiTive and negaTive Poles . ........................................................................................180 Shouhei Shiga, Dong F. Wang, Takao Ishida, Ryutaro Maeda siMulaTion of 3d soi-sTruCTures for MeMs eleMenTs . .............................................................................184 Igor Kogut, Victor Holota, Victor Dovhij, Anatoliy Druzhinin sTudies of oPTiCal and CrysTal ProPerTies of ald grown zno . ............................................................185 David Elam, Anastasiia Nemashkalo, Yuri Strzhemechny, Chonglin Chen, Arturo Ayon, Andrey Chabanov a MeThodology for The Pull-in volTage of ClaMPed diaPhragMs . ....................................................187 Joseph Lardiès, Marc Berthillier oPTiMisaTion and realisaTion of a PorTaBle nMr aPParaTus and MiCro anTenna for nMr . .......193 Patrick Poulichet, Latifa Fakri-Bouchet, Christophe Delabie, Lionel Rousseau, Abdenasser Fakri, Anne Exertier ix
Convex Corner CoMPensaTion for a CoMPaCT seisMiC Mass wiTh high asPeCT raTio using anisoTroPiC weT eTChing of (100) siliCon ............................................197 Jyh-Cheng YU a PrograMMaBle neural MeasureMenT sysTeM for sPikes and loCal field PoTenTials . ...........200 Jonas Pistor, Janpeter Hoeffmann, Dagmar Peters-Drolshagen, Steffen Paul Thursday 12 May PANEL DISCUSSION HERMETICITY TESTS IN MEMS ................................................................................206 Marc Desmulliez, Suzanne Costello, Heriot-Watt University, Edinburgh, UK., Wolfgang Reinert, Fraunhofer Institute for Silicon Technology Fraunhofer, Germany, Steven Martell, Sonoscan Inc., USA herMeTiCiTy TesT MeThods for MeMs:where are we? ...............................................................................207 Marc Desmulliez sTandards for herMeTiCiTy TesT MeThods . ..................................................................................................208 Suzanne Costello q-faCTor MoniToring as a 100% leak sCreen in indusTrial aPPliCaTions . ..........................................209 Wolfgang Reinert evaluaTing The seal inTegriTy of MeMs herMeTiC PaCkages ................................................................210 Steven R. Martell PANEL DISCUSSION HIGH ADDED VALUE MEMS ........................................................................................211 Jérémie BOUCHAUD, IHS iSuppli, Munich, Germany, Jean Michel Karam, MEMSCAP, Bernin, France, Sean Neylon, Colibrys, Neuchâtel, Switzerland, Thierry Brisard, NEOSENS, Toulouse, France SPECIAL SESSION ON NETWORKED MICROSYSTEMS FOR GREEN AND LIFE INNOVATION inTegraTed sensing sysTeMs for healTh and safeTy . ..............................................................................212 Kiyoshi ITAO design, faBriCaTion, and inTegraTion of PiezoeleCTriC MeMs deviCes for aPPliCaTions in wireless sensor neTwork . ..........................................................................................217 Jian Lu, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda novel MeMs digiTal TeMPeraTure sensor for wireless avian-influenza MoniToring sysTeM in PoulTry farM . .............................................................................................................222 Yi Zhang, Hironao Okada, Takeshi Kobayashi, Toshihiro Itoh aPPliCaTion of wireless sensor nodes To CoMMerCial Power ConsuMPTion MoniToring . .........227 Toshihiro Itoh, Jun Fujimoto, Ryutaro Maeda, Takeshi Kobayashi, Toshihiro Itoh, Ryutaro Maeda develoPing MeMs dC eleCTriC CurrenT sensor for end-use MoniToring of dC Power suPPly .......231 Kohei Isagawa, Dong F. Wang, Takeshi Kibayashi, Toshihiro Itoh, Ryutaro Maeda low Power analog To digiTal ConverTor wiTh digiTal CaliBraTion for sensor neTwork .......237 Tsukasa Fujimori, Hiroshi Imamoto, Hideaki Kurata, Yasushi Goto, Toshihiro Ito, Ryutaro Maeda x
Page 2 and 3: COLLECTION OF PAPERS PRESENTED AT T
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Page 8 and 9: Table of Contents Wednesday 11 May
Page 12 and 13: Friday 13 May SESSION C4: APPLICATI
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Page 24 and 25: suspended membrane can be pulled to
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Page 32 and 33: 2) Cavity width effect To verify th
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Page 40 and 41: The anode and cathode are connected
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Page 54 and 55: ! TABLE 3 SUMMARY OF SELECTIVITIES
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11-13 May 2011, Aix-en-Provence, Fr
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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11-13 May 2011, Aix-en-Provence, F
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Fig. 14. Time history of the envelo
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We have reported that how base mode
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We assume that 11-13 May 2011, Aix
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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11-13 May, Aix-en-Provence, France
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80˚C. Additionally, we looked into
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The XRD shows a peak above the 2θ
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fibers which define the electric co
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Figure 15. Key board input system.
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ρ = h 2∆α∆T + + E 1h 3 1 +E 2
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In recent years, the pipe flow moni
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As the speed of the rotor increases
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inches silicon wafers which have th
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samples tested in different vacuum
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l c 11-13 May 2011, Aix-en-Provence
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Vp (V) 3,5 3,0 2,5 2,0 1,5 1,0 0,5
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II. MATHEMATICAL MODEL AND NUMERICA
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fluids travel along a curved channe
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measured mixing indices are depicte
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length, which enables them to focus
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however, a rotation for coincidence
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excludes the nature of the fixed bo
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Using the radial and tangential mid
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Now the challenge in data handling
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value of every active channel. Ther
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electrocardiogram. • The heart be
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In our work, we proposed an innovat
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Fig. 8 Concept of the in-home perso
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found that the early-stage diagnosi
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Power monitoring data detected by w
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device consisted of a bimorph canti
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where C others is the capacitance o
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operation, the pressure inside the
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increased. 11-13 May 2011, Aix-en-
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coefficient compatible with the mic
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Variable Description Value Crab-leg
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Membrane weight (mg) Fig. 4. Struct
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So far, the expected major contribu
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al. used a modified LIGA (German ac
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REFERENCES [1] G. Mehta, J. Lee, W.
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followed by titanium (Ti) which sho
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exposure dose, post exposure bake t
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#### ##/&### 3 # #
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*5%6,+/.,-,7-, ,+.,1/21* %
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B. Energy Applications Society is f
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Presently, the microfabrication pro
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[6] C. Richard, A. Renaudin, V. Aim
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NA sinθ c 11-13 May 2011, Aix-en-
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the waveguide on the fused silica,
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microphone diaphragm. The chosen CM
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TABLE V MICROPHONE CHARACTERISTICS
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Figure 7b shows the effect of a par
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over the temperature range (i.e. th
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given. This allows a CTM model to b
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the magic-Tee, and the coherent sig
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After analyzing the two conditions
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IV. MICRO FABRICATION For fabricati
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IV. A. Simulation and Sensitivity A
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grown to sub-confluence were washed
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Clamps rotation [21] Clamps transla
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Layout Total dimensions of the grip
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focusing increased both as the stre
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11-13 May, 2011, Aix-en-Provence,
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Time of diffusion (hr) 1200 1000 80
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Chip Magnet Light source Hot plate
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above, they would move to upward an
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This phenomenon is now reaching the
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C. Proof mass displacement Moreover
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The VerilogA block code is : 11-13
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Author Index Abi-Saab D. 81 Aimez V
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Nussbaum Dominic 273 O’Hara T. 35
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