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11-13 May 2011, Aix-en-Provence, France V. MODIFIED CRESCENT PATTERNS FOR DEVICES WITH POSITIVE AND NEGATIVE POLES A modified “crescent-shaped” alignment mark, called “crescent-shaped/interval” as shown in Fig. 8, has been further proposed. The basic idea is to separate the “crescent-shaped” pattern into two parts with an insulated space area between them, so as to correspond to positive and negative poles, respectively. In order to study the effect of interval a, as defined in Fig. 8, on the surface energy during self-alignment, the overlap ratio as a function of the offset angles has been calculated and compared for different interval a. It can be noted that the self-alignment of micro-parts with positive and negative poles could be achieved with a maximum misalignment angle of 30 o degree, when the interval is set as 1:26, as shown in Fig.9. (a) 25 a (b) Fig. 10. Target substrate design (Fig. 10(a)) for integration of prototype micro-parts (Fig. 10(b)) with positive and negative poles. Fig. 8. A modified crescent-shaped alignment mark, called crescent-shaped/interval pattern, proposed for micro-parts with positive and negative poles. VI. CONCLUSIONS A newly designed two dimensional asymmetric alignment mark, so called as “crescent-shaped” pattern, has been derived as the most suitable one for self-alignment of the micro-parts to the binding sites of the substrate, using overlap ratio based on the surface energy model of a capillary effect. The energy barrier of the proposed “crescent-shaped” pattern is theoretically lower than that of the reported “tear-drop” pattern with elliptical holes. A modified “crescent-shaped” alignment mark, so called as “crescent-shaped/interval”, has been further proposed and designed to be applicable to micro-parts or devices with positive and negative poles on the binding sites. ACKNOWLEDGEMENT Part of this work was supported by MEMS Inter University Network and performed in the Ubiquitous MEMS & Micro Engineering Research Center (UMEMSME) of National Institute of Advanced Industrial Science & Technology (AIST). Fig. 9. Overlap ratio between a moving part and a binding site with a relation to different interval a in crescent-shaped/interval pattern. A target substrate with special binding sites with “crescent-shaped/interval” alignment mark for integration of micro-parts with poles, where a uni-directional self-alignment is necessary, has been designed for further practicable study, as shown in Fig. 10. Firstly, both the Au surface on substrate and the backside of micro-parts are patterned with proposed marks. Secondly, electrodes are connected to Au wire on the substrate after self-alignment. Finally, the integration is demonstrated to examine the feasibility of uni-directional self-alignment. REFERENCES [1] A. Terfort, N. Bowden, and G.M. Whitessides, Three-dimensional self-assembly of milllimeter-scale components, Nature, 386 (1997) 162-164. [2] U. Srinivasan, D. Liepmann, and R.T. Howe, Microstructure to substrate self-assembly using capillary forces, J. Microelectromech. Syst., 10 (2001) 17-24. [3] D. F. Wang, and S. Shiga, Fabrication ofmicro and nanostructures using self-assembly, Proceedings of Ibaraki District Conference 2009, pp.127-128, JSME, Tsukuba, Japan. [4] C. Lin, F. Tseng, and C. Chieng, Orientation-specific fluidic self-assembly process based on a capillary effect, J. Micromech. Microeng., 19 (2009) 1-12. [5] K.F. Bohringer, U. Srinivasan, and R.T. Howe, Modeling of capillary forces and binding sites for fluidic self-assembly, Proc. IEEE workshop on Micro electro Mechanical 183
11-13 May, Aix-en-Provence, France Simulation of 3D SOI-Structures for MEMS elements Igor KOGUT, Victor HOLOTA, Victor DOVHIJ (Precarpatian U., Ivano-Frankivsk, Ukraine) Anatoliy DRUZHININ (National U. "Lvivska Politechnika", Lviv, Ukraine) Text unavailable at the time of printing. 184
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COLLECTION OF PAPERS PRESENTED AT T
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III
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V
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Table of Contents Wednesday 11 May
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PANEL DISCUSSION TEXTILE MICROSYSTE
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Friday 13 May SESSION C4: APPLICATI
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SPECIAL SESSION OF BIO-MEMS/NEMS a
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11-13 May 2011, Aix-en-Provence, Fr
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11-13 May 2011, Aix-en-Provence, F
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suspended membrane can be pulled to
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most likely due to not yet consider
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that detectors may measure the diff
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2) Cavity width effect To verify th
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Fig.9. Capacitive sensor output, Va
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11-13 May, 2011, Aix-en-Provence,
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The anode and cathode are connected
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! TABLE 3 SUMMARY OF SELECTIVITIES
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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Fig. 14. Time history of the envelo
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We have reported that how base mode
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We assume that 11-13 May 2011, Aix
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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Page 162 and 163: Figure 15. Key board input system.
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device consisted of a bimorph canti
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where C others is the capacitance o
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operation, the pressure inside the
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increased. 11-13 May 2011, Aix-en-
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coefficient compatible with the mic
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Variable Description Value Crab-leg
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Membrane weight (mg) Fig. 4. Struct
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So far, the expected major contribu
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al. used a modified LIGA (German ac
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REFERENCES [1] G. Mehta, J. Lee, W.
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followed by titanium (Ti) which sho
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exposure dose, post exposure bake t
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B. Energy Applications Society is f
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Presently, the microfabrication pro
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[6] C. Richard, A. Renaudin, V. Aim
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NA sinθ c 11-13 May 2011, Aix-en-
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the waveguide on the fused silica,
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microphone diaphragm. The chosen CM
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TABLE V MICROPHONE CHARACTERISTICS
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Figure 7b shows the effect of a par
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over the temperature range (i.e. th
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given. This allows a CTM model to b
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the magic-Tee, and the coherent sig
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After analyzing the two conditions
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IV. MICRO FABRICATION For fabricati
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IV. A. Simulation and Sensitivity A
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grown to sub-confluence were washed
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Clamps rotation [21] Clamps transla
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Layout Total dimensions of the grip
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focusing increased both as the stre
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Time of diffusion (hr) 1200 1000 80
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Chip Magnet Light source Hot plate
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above, they would move to upward an
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This phenomenon is now reaching the
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C. Proof mass displacement Moreover
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The VerilogA block code is : 11-13
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Author Index Abi-Saab D. 81 Aimez V
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Nussbaum Dominic 273 O’Hara T. 35
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