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11-13 May 2011, Aix-en-Provence, France generated by the treatment operated in the FPGA. good aspect and good uniformity of the deposited layer. Fig. 6. Micro coil on the right and the PCB used to tune and match the signal Fig. 4. Signal generated with and without the noise The process to deposite the thick resist is difficult to optimise because the thickness is around 50 µm. The resist have to be etched for 50 µm on a width of 20 µm. Thus, at the bottom of the hole, if there are some rests of the resist, the adherence of the cooper will be poor. It’s this problem that we can see on the Fig. 7; there a lack of cooper inside the cercle. Fig. 5 shows the shape of the signal generated from the spectrometer. We choose to deliver a sequence CPMG of three pulses [π/2 π π] separated by [t 2 t 4 t 6 ]. Each times are programmed in the VHDL code of the FPGA. Fig. 7 : Photography of the microcoil NMR Fig. 5 : Shape of the generated signal from the spectrometer The pattern represents in the Fig. 8 is used to verify that the resistivity of the layer copper deposited is correct. The thickness is 30 µm, the width is 42 µm and the total length of the pattern is about 10.9 mm. Thus resistivity calculation −8 gives ρ = 2,88.10 Ω .m . After bake at 150 °C during 30 −8 minutes, the resistivity is ρ = 2.10 Ω .m . It is not far from −8 the theoretical copper resistivity ρ = 1,72.10 Ω .m . II. MICROCOIL NMR NMR micro coil represented in Fig. 6 detects the FID and is connected to the PCB for tuning and matching circuit. It is connected to the PCB for tuning and matching. Then, the signal is fed to an external amplifier. To improve the SNR, the resistance of the micro coil has to be very low. Therefore, the thickness of the copper used to realize the coil has to be thick so usually it uses electroplating. We optimize the electroplating process: flow of the electrolyte, current density, additive in the electrolyte in order to obtain Fig. 8. Shape used to determine the resistivity of the electroplate copper ©<strong>EDA</strong> <strong>Publishing</strong>/DTIP 2011 195
III. CONCLUSION Two important parts necessary for NMR measurement are described in this paper. In the first part, a portable NMR apparatus is described. In the future, the array of magnets will be modified to reduce the inhomogeneities of B0. The running works concern also the achievement of PC supervisor linked to the Portable NMR divice. In the second part, the realization of a micro coil is described. The two parts are designed to constitute an original NMR portable system for the analysis of low volumes samples. 11-13 May 2011, Aix-en-Provence, France A special thanks to the folowing students that worked on one part of this projet: LIMA MIGLIORINI Fabricio, ZHANG Shu and ZHANG Hao. REFERENCES [1] E. Danieli, J. Mauler, J. Perlo, B. Blümich, F. Casanova, “Mobile sensor for high resolution NMR spectroscopy and imaging” Journal of Magnetic Resonance 198, 2009, pp 80-87. [2] C. Hugon, F. D’Amico, G. Aubert, D. Sakellariou, “Design of arbitrarily homogeneous permanent magnet systems for NMR and MRI: Theory and experimental developments of a simple portable magnet“, Journal of Magnetic Resonance 205, 2010, pp75-85. [3] W-H Changa, J-H Chena, L-P Hwang “Single-sided mobile NMR with a Halbach magnet” in Magnetic Resonance Imaging 24, 2006, pp 1095–1102. [4] V. DEMAS, P. J. PRADO, “Compact Magnets for Magnetic Resonance”, Concepts in Magnetic Resonance PartA, Vol. 34A(1), 2009, pp 48–59. [5] K. Takeda, “OPENCORE NMR: Open-source core modules for implementing an integrated FPGA-based NMR spectrometer”, Journal of Magnetic Resonance 192, 2008, pp 218–229. [6] Baxan et al, C.R.Chim.2007. [7] Lacey et al, Chem.Rev.1999. [8] Kadjo , et al, ESMRMB, Valencia, 2008. BIOGRAPHIE Patrick Poulichet received his degree of electrical engineer at CNAM-Paris in 1998. He received the Ph.D. degree in Electrical Engineering from the École Normale Supérieure de Cachan (SATIE CNRS UMR 8029) in 2001. Since 1995, he has been with the Department of Electrical Engineering, at ESIEE (Ecole Supérieure d’Ingénieurs en Electronique et Electrotechnique) in France, as an Associate Professor. His research concerns portable NMR, integrated electronic and MEMS, and EMC. Latifa Fakri-Bouchet received her Ph. D degree in the field of biomedical engineering from Lyon 1 university in 1996. Lastly she obtained the “habilitation” for Research Heading (HDR, 2008). Since 1995, she was assistant Professor (ATER), and then Associate Professor at Institut Universitaire de Technologie (IUT) of Lyon, and Laboratory CREATIS-LRMN UMR CNRS 5220, U630 INSERM, Université Lyon1 Claude Bernard, INSA de Lyon. Her main interest is in development of electronic circuits, and instrumentation dedicated to NMR biomedical applications, more particularly coils and micro coils design, and NMR instrumentation potentially leading to developments for clinical purposes and industrial applications. 196
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COLLECTION OF PAPERS PRESENTED AT T
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III
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V
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Table of Contents Wednesday 11 May
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PANEL DISCUSSION TEXTILE MICROSYSTE
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Friday 13 May SESSION C4: APPLICATI
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SPECIAL SESSION OF BIO-MEMS/NEMS a
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suspended membrane can be pulled to
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most likely due to not yet consider
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that detectors may measure the diff
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2) Cavity width effect To verify th
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Fig.9. Capacitive sensor output, Va
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The anode and cathode are connected
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! TABLE 3 SUMMARY OF SELECTIVITIES
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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Fig. 14. Time history of the envelo
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We have reported that how base mode
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We assume that 11-13 May 2011, Aix
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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11-13 May, Aix-en-Provence, France
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80˚C. Additionally, we looked into
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The XRD shows a peak above the 2θ
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fibers which define the electric co
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Page 230 and 231: electrocardiogram. • The heart be
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increased. 11-13 May 2011, Aix-en-
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coefficient compatible with the mic
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Variable Description Value Crab-leg
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Membrane weight (mg) Fig. 4. Struct
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So far, the expected major contribu
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al. used a modified LIGA (German ac
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REFERENCES [1] G. Mehta, J. Lee, W.
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followed by titanium (Ti) which sho
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exposure dose, post exposure bake t
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#### ##/&### 3 # #
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*5%6,+/.,-,7-, ,+.,1/21* %
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B. Energy Applications Society is f
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Presently, the microfabrication pro
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[6] C. Richard, A. Renaudin, V. Aim
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NA sinθ c 11-13 May 2011, Aix-en-
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the waveguide on the fused silica,
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microphone diaphragm. The chosen CM
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TABLE V MICROPHONE CHARACTERISTICS
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Figure 7b shows the effect of a par
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over the temperature range (i.e. th
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given. This allows a CTM model to b
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the magic-Tee, and the coherent sig
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After analyzing the two conditions
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IV. MICRO FABRICATION For fabricati
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IV. A. Simulation and Sensitivity A
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grown to sub-confluence were washed
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Clamps rotation [21] Clamps transla
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Layout Total dimensions of the grip
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focusing increased both as the stre
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Time of diffusion (hr) 1200 1000 80
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Chip Magnet Light source Hot plate
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above, they would move to upward an
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This phenomenon is now reaching the
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C. Proof mass displacement Moreover
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The VerilogA block code is : 11-13
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Author Index Abi-Saab D. 81 Aimez V
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Nussbaum Dominic 273 O’Hara T. 35
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