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Online proceedings - EDA Publishing Association

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11-13 May 2011, Aix-en-Provence, France<br />

<br />

Agile MEMS packaging<br />

for mass customized MEMS products<br />

Jens G. Kaufmann, David Flynn, Keith Brown, Marc P.Y. Desmulliez<br />

Heriot-Watt University<br />

School of Engineering and Physical Sciences<br />

Edinburgh, EH14 4AS, Scotland, UK<br />

jens@jens-kaufmann.net<br />

Abstract - The market for micro electromechanical systems<br />

(MEMS) is becoming increasingly competitive especially for<br />

small and medium sized enterprises. The progressing trend in<br />

mass manufacturing leads to very few competitors that dominate<br />

the MEMS market. This competitive environment results in<br />

cheap devices with limited variation, therefore opportunities at<br />

the tail end of the market are usually neglected. The MEMS<br />

research community predominantly focuses on new device types<br />

and manufacturing methods with a high impact factor and those<br />

are naturally settled in the mass market segments.<br />

This paper introduces an approach for research and<br />

development that aims to open the opportunities within the long<br />

tail of the market. It consists mostly of a combination of new<br />

design approaches for MEMS and packaging, software tools and<br />

digital manufacturing technologies to ensure that solutions<br />

developed are ones that can be adapted to different customer<br />

requirement on a level that is perhaps uncommon in the MEMS<br />

community.<br />

I. INTRODUCTION<br />

The high investment costs involved with producing MEMS<br />

have in the past proven to put an emphasis on devices and<br />

products for the mass market [1]. Even products that can have<br />

revolutionary properties for some applications can take<br />

decades to arrive in the commercial markets. This is often due<br />

to a limit sized market and high development and<br />

manufacturing cost of MEMS and therefore often rejected<br />

until the market potential becomes large enough to justify the<br />

common mass manufacturing approach [2].<br />

The obsolescence of older aircrafts as well as the enormous<br />

investments required to replace them, has stimulated an<br />

increasing demand for innovative service concepts in the<br />

avionics industry [3]. One of the key areas to keep an aircraft<br />

flying is the condition of the electrical systems. However<br />

faults in the wiring harnesses are highly difficult to detect [4].<br />

To overcome these issues, a new sensor approach was<br />

developed based on a distributed sensor network on board the<br />

aircraft itself. [5] To make this technology available to the<br />

ageing aircraft market it was necessary to incorporate the<br />

specific requirements of the market. The large variety of<br />

geometry, material combination and signals employed for<br />

aircraft wiring over the last 70 years, not only between models<br />

of aircraft but also amogst planes of the same model, makes it<br />

impossible to develop a one-fits-all solution hence mass<br />

manufacturing of the sensor product is not a viable<br />

proposition.<br />

II. MASS CUSTOMISATION OF MEMS PACKAGING<br />

The ability to manufacture responsively is one of the principal<br />

requirements for commercial MEMS products. The<br />

automotive industry was the first to successfully optimize the<br />

production of their MEMS devices, followed by the consumer<br />

electronics and telecommunications industry. To achieve these<br />

commercial volumes, the types of devices were limited.<br />

New forms of MEMS devices have problems presenting an<br />

attractive business opportunity, if they have a limited range of<br />

applications. The resulting niche of potential customers is<br />

often too small to justify large-scale productions that come<br />

with the current methods of MEMS manufacturing. [1]<br />

Even though this seems to be a problem that is difficult to<br />

overcome, packaging as a support technology allows, in many<br />

cases, the properties of a MEMS device to be extended into a<br />

previously inaccessible application.<br />

As with MEMS themselves the packaging technology is<br />

mainly derived from the mass manufacturing methods from<br />

electronics manufacturing and consequently suffers from<br />

similar constraints. As a result of this, change has a high<br />

impact on the entire product lifecycle and neither the<br />

conventional design, manufacturing nor test tools have the<br />

capacity to deal with an agile design and cost competitive<br />

product requirement.<br />

In this paper the Health and Usage Monitoring MicroSystems<br />

(HUMMS) that are shown below demonstrate the vairous<br />

strategies that were employed in the different stages of its<br />

product life cycle to avoid impact of change originated from<br />

the customer and allow selling of MEMS into the long tail<br />

market of maintenance of ageing aircrafts. [5]<br />

III. DESIGN CONCEPTS<br />

Overview<br />

The way the product was conceptualized is based on four<br />

different concepts: Axiomatic design (AD), Generative design<br />

(GD), Rapid manufacturing (RM), which allow for an<br />

integrated design and manufacturing approach, and Automated<br />

Testing. AD is the overarching design framework, GD is what<br />

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