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Nussbaum Dominic 273 O’Hara T. 35 Okada Hironao 221 Ostasevicius Vytautas 164 Othman Raihan 85 Ouellet Luc 300 Papin G. 392 Parsa R. 348 Paul Steffen 200 Peters-Drolshagen Dagmar 200 Picaud S. 378 Pistor Jonas 200 Pittet Patrick 300 Poulichet Patrick 193, 392 Proietti Emanuela 263 Ramstad J. E. 116 Redondo Roxana 29 Rehder Gustavo 309 Reinert Wolfgang 206, 209 Reitz Sven 64 Rekik A.A. 14 Rencz Marta 324 Ress Sandor 324 Rezaie A.H. 3 Richalot E. 81 Richard Charles 300 Robert Laurent 278 Rousseau Lionel 193, 378 Rufer Libor 309 S. Mousavi M. Mehdi 356 Salleh Hanim 85 Salut Roland 278 Sarkany Zoltan 324 Schäffel Christoph 106, 344 Scherner S. 253 Schneider Marc 277 Schneider Peter 64 Schrag Gabriele 8 Scorsone E. 378 Shahosseini Iman 258 Shamshirsaz Mahnaz 3, 103 Shibayama Nobuhisa 142 Shie Shian Ruei 170 Shiga Shouhei 180 Shih Hsin-Yuan 362 Shih Wei-Hung 245, 305 Shih Wen-Pin 372 Sikora Karsten 283 Silva Emanuel 72 Simoni Barbara 53 Soeraasen O. 116 Somà Aurelio 97, 356 Strzhemechny Yuri 185 Takamatsu Seiichi 142 Tang Jaw-Luen 245, 305 Toepper Michael 46 Tong Chi-Jia 159 Trigona Carlo 315 Tsai Ching-Hsiu 366 Tsai Yu-Tze 381 Tschanun W. 128 Ueda T. 148 Vass-Varnai Andras 324 Velten Thomas 273 Voigt Sebastian 106, 344 Wachutka Gerhard 8 Wang C.H. 35 Wang Dong F. 180, 231, 338 Wang Gou-Jen 23, 381 Wang Jian-Neng 245, 305 Wang Shau-Chun 245, 305 Wang Song Hao 151 Wang Yu-Chi 372 Wang Yu-Ting 159 Weiland D. 253 Weng Feng-Tsai 268 Wilhelm Stefan 110 Wisland D. 116 Wong Philip H.-S. 348 Worgull Matthias 277, 283 Woytasik Marion 258 Wu Chia-Che 366 Wu Ming-Dao 372 Wu Wei-Te 245, 305 Ya Ma Li 18 Yang Hsiharng 176, 268, 294 Yu Jyh-Cheng 90, 197 Yvert B. 378 Zaminpeyma E. 103 Zhang Lan 333 Zhang Yi 217, 221 Zihajehzadeh Sh. 3 Zimin Y. 148 Zoschke Kai 46 400
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COLLECTION OF PAPERS PRESENTED AT T
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III
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V
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Table of Contents Wednesday 11 May
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PANEL DISCUSSION TEXTILE MICROSYSTE
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Friday 13 May SESSION C4: APPLICATI
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SPECIAL SESSION OF BIO-MEMS/NEMS a
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11-13 May 2011, Aix-en-Provence, Fr
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11-13 May 2011, Aix-en-Provence, F
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suspended membrane can be pulled to
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most likely due to not yet consider
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that detectors may measure the diff
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2) Cavity width effect To verify th
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Fig.9. Capacitive sensor output, Va
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11-13 May, 2011, Aix-en-Provence,
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The anode and cathode are connected
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11-13 May , 2011 , Aix-en-Provence,
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! 11-13 May 2011, Aix-en-Provence,
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! 11-13 May 2011, Aix-en-Provence,
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! TABLE 3 SUMMARY OF SELECTIVITIES
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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Fig. 14. Time history of the envelo
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We have reported that how base mode
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We assume that 11-13 May 2011, Aix
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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11-13 May, Aix-en-Provence, France
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80˚C. Additionally, we looked into
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The XRD shows a peak above the 2θ
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fibers which define the electric co
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Figure 15. Key board input system.
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ρ = h 2∆α∆T + + E 1h 3 1 +E 2
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In recent years, the pipe flow moni
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As the speed of the rotor increases
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inches silicon wafers which have th
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samples tested in different vacuum
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l c 11-13 May 2011, Aix-en-Provence
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Vp (V) 3,5 3,0 2,5 2,0 1,5 1,0 0,5
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II. MATHEMATICAL MODEL AND NUMERICA
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fluids travel along a curved channe
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measured mixing indices are depicte
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length, which enables them to focus
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however, a rotation for coincidence
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excludes the nature of the fixed bo
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Using the radial and tangential mid
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Now the challenge in data handling
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value of every active channel. Ther
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electrocardiogram. • The heart be
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In our work, we proposed an innovat
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Fig. 8 Concept of the in-home perso
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found that the early-stage diagnosi
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Power monitoring data detected by w
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device consisted of a bimorph canti
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where C others is the capacitance o
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operation, the pressure inside the
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increased. 11-13 May 2011, Aix-en-
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coefficient compatible with the mic
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Variable Description Value Crab-leg
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Membrane weight (mg) Fig. 4. Struct
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So far, the expected major contribu
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al. used a modified LIGA (German ac
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REFERENCES [1] G. Mehta, J. Lee, W.
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followed by titanium (Ti) which sho
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exposure dose, post exposure bake t
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#### ##/&### 3 # #
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*5%6,+/.,-,7-, ,+.,1/21* %
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B. Energy Applications Society is f
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Presently, the microfabrication pro
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[6] C. Richard, A. Renaudin, V. Aim
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NA sinθ c 11-13 May 2011, Aix-en-
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the waveguide on the fused silica,
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microphone diaphragm. The chosen CM
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TABLE V MICROPHONE CHARACTERISTICS
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Figure 7b shows the effect of a par
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over the temperature range (i.e. th
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given. This allows a CTM model to b
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the magic-Tee, and the coherent sig
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After analyzing the two conditions
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IV. MICRO FABRICATION For fabricati
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IV. A. Simulation and Sensitivity A
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Page 410 and 411: Author Index Abi-Saab D. 81 Aimez V
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