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Online proceedings - EDA Publishing Association

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etween x 2 to L (remember that x 2 is measured from the left<br />

side of clamed end of the beam to electrode pair of sensor<br />

part, and L is the length of beam).From figure 2, the electrode<br />

pair can be used to covers from 0.77L to L and best output<br />

voltage can be obtained from the first vibration mode. To<br />

explain this, normalized mode shape for first vibration mode<br />

is shown in Figure 3. Strain for piezoelectric film is<br />

proportional to the curvature of beam. The strain distribution<br />

between 0.77L to L and 0.22L to 0.77L will cancel each other.<br />

Best output voltage will be obtained when the length of<br />

output electrode pair is 0.22L.<br />

Voltage (mv)<br />

5<br />

4.5<br />

4<br />

3.5<br />

3<br />

2.5<br />

2<br />

1.5<br />

1<br />

0.5<br />

0<br />

0 0.05 0.1 0.15 0.2 0.25 0.3 0.35<br />

Nondimensional electrode length, x/L<br />

Fig. 2 Effect of nondimensional electrode length on output voltage<br />

Mass normalized mode<br />

shape<br />

2.00<br />

1.00<br />

-<br />

-1.00<br />

-2.00<br />

output voltage<br />

0 0.2 0.4 0.6 0.8 1<br />

Fig.3 The mode shape and curvature of cantilever<br />

4.2 Effect of cantilever length on output voltage and<br />

frequency<br />

deflection<br />

curvature<br />

Nondimensional beam coordinate, x/L<br />

Figure 4 shows that voltage output and resonance<br />

frequency for different lengths of cantilever lengths and the<br />

transformer is also excited at first vibration mode. In this<br />

study, material, geometric, and electromechanical parameters<br />

of transformers are shown in Table 1 but cantilever lengths<br />

vary from 5cm to 100cm. From figure 4, output is<br />

proportional to the square of cantilever length and 1 st<br />

resonance frequency is inversely proportional to the square of<br />

cantilever length. Longer beam exceeds larger output but<br />

lower excitation frequency.<br />

4.3 Effect of the thickness on output voltage<br />

Figure 5 shows that output for different thickness ratios<br />

between PZT and substrate when the transformer is excited at<br />

first resonance. In this study, material, geometric, and<br />

electromechanical parameters of transformers are also shown<br />

in Table 1 but thicknesses of substrate vary from 0.125mm to<br />

1mm. The best output can be obtained when the thickness<br />

11-13 May 2011, Aix-en-Provence, France<br />

<br />

ratio between substrate and PZT is close to 2. Thickness ratio<br />

between substrate and PZT will change the position of<br />

neutral axis of beam. Figure 6(a) and 6(b) shows that neutral<br />

axis lies within substrate and within PZT, respectively. To see<br />

the stress distribution, tensile and compress stresses will<br />

cancel each other when neutral axis lies with PZT layer. We<br />

might think the best output will be obtained when the neutral<br />

axis is located in the contact plane between substrate and<br />

PZT. However, the maximum output voltage occurs when<br />

neutral axis lies within substrate (Fig. 6(a)).<br />

In this study, the thickness of PZT is 0.25 mm and<br />

thickness of substrate varies. When the thickness of substrate<br />

become larger, the distance from neutral axis to top of the<br />

beam will increase but bending stiffness will also increase.<br />

Larger bending stiffness will cause smaller deflection and of<br />

beam when actuator part is excited at the same input voltage.<br />

In the other word, maximum normal stress of beam will<br />

decreases when bending stiffness increases. The output<br />

voltage will be proportional to the summation of normal<br />

stress of beam. The maximum output voltage will occurs<br />

when neutral axis lies within substrate but not in the contact<br />

plane between substrate and PZT. Figure 7 shows that output<br />

voltages for different thickness ratio between PZT and<br />

substrate when choosing different substrate. Young’s<br />

modulus ratio between PZT and substrate varies from 1 to 2.8.<br />

Different Young’s modulus ratio leads to different thickness<br />

ratio to achieve best output of transformer. When the Young’s<br />

modulus ratios are 1 and 2.8, the best output are 0.078V and<br />

0.090V, respectively. The results are summarized in table 2.<br />

frequency (Hz)<br />

500<br />

450<br />

400<br />

350<br />

300<br />

250<br />

200<br />

150<br />

100<br />

50<br />

0<br />

5 20 35 50 65 80 95<br />

cantilever length (cm)<br />

Fig. 4 voltage output and nature frequency with different cantilever lengths<br />

Voltage (mV)<br />

80<br />

70<br />

60<br />

50<br />

40<br />

30<br />

20<br />

free vibration frequency<br />

out put voltage<br />

0.5 1 1.5 2 2.5 3 3.5 4<br />

thinkness ratio, substrate/PZT<br />

Fig. 5 output voltage vs. thickness ratio between substrate and PZT layers<br />

5<br />

4.5<br />

4<br />

3.5<br />

3<br />

2.5<br />

2<br />

1.5<br />

1<br />

0.5<br />

0<br />

voltage (V)<br />

output voltage<br />

79

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