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11-13 May 2011, Aix-en-Provence, France especially fully implantable systems have a rather rigid design in terms of system architecture and therefore functionality. Actually the presented digital system tries to combine key advantages of the measurement systems listed in the first chapter: our digital system incorporates the flexibility of the Hermes-system, the aim of a fully implantation similar to the NRM - but without the cranial unit and therefore without the percranial cable - and the high degree of integration similar to the INI-chip, at least Fig. 9. Waveform view of recorded sine waves from the prototype [6]. for the digital system planned to included in an ASIC. After the target is met, the system still keeps its flexibility for future applications without any modifications necessary. If for some reasons a rigid system in terms of performance is needed, it is also possible to adapt the system on hardware base with a relative low effort, since all performance parameters are already known from the evaluation process. Due to the serial data handling and the fact that undesired measurement data and a lot of protocol overhead is removed in an early stage regarding signal propagation, the system has an increased performance with a low hardware complexity and therefore a reduced power demand. The flexibility of the system allows the user to fill the limited transceiver bandwidth with the best fitting product of resolution, number of channels and sample frequency, with respect to the particular application. A. Future Work Future work will concentrate on the ongoing increase in integration of all electrical components in order to achieve the goal of a fully implantable neural measurement micro system. The final goal is a single chip solution incorporating the whole signal path starting from the passive electrode/needle ending at the RF-Transceiver interface. To satisfy the demand in higher numbers of electrodes and thereby an increase in neural data, one has to think about sophisticated ways of data reduction without losing any neural information. A reduction in data rate through data compression also reduces the power consumption of the measurement system. Besides the flexibility in performance, it is also desirable to have a certain degree of redundancy if some parts of the system are malfunctioning. This redundancy has a direct influence on the system reliability, which is crucial for a non-removable fully implantable medical device. So the “perfect” system consists of several measurement units, each totally autonomous in terms of power supply and data link, carrying all the flexibility described in this paper. In this manner one gets a measurement system where each electrode is connected to at least two-subsystems, so there is a fairly high chance that each electrode is at least represented once in the overall system, able to propagate its neural data through the neural measurement system. B. Compared to Other Work Compared to other work, the work presented in this paper has a significant degree of flexibility. Other systems, ACKNOWLEDGMENT The authors would like to thank the German Federal Ministry of Education and Research (BMBF) for subsidizing this work within the KALOMED-project. Also the authors would like to thank Mr. Opel for his valuable support in technical implementation of the FPGA-based prototype. REFERENCES [1] Y.-K. Song, D. A. Borton, S. Park, W. R. Patterson, C. W. Bull, F. Laiwalla et al, “Active Microelectronic Neurosensor Arrays for Implantable Brain Communication Interfaces,” in IEEE Trans. on Neural Systems and Rehabilitation Engineering, vol. 17, no. 4, August 2009, pp. 339-345. [2] Henrique Miranda, Vikash Gilja, Cindy A. Chestek, Krishna V. Shenoy and Teresa H. Meng, “HermesD: A High-Rate Long- Range Wireless Transmission System for Simultaneous Multichannel Neural Recording Applications,” in IEEE Trans. on Biomedical Circuits and Systems, vol. 4, no. 3, June 2010, pp. 181- 191. [3] Reid R. Harrison, Ryan J. Kier, Cynthia A. Chestek, Vikash Gilja, Stephen Ryu, Bradley Greger et al, “Wireless Neural Recording with Single Low-Power Integrated Circuit,” in IEEE Trans. on Neural Systems and Rehabilitation Engineering, vol. 17, no. 4, August 2009, pp. 322-329. [4] “RHA2116 – Fully Intergated 16-Channel Biopotential Amplifier Array”, intan Technologies, LLC, Datasheet, 19 May 2010. [5] Generated with the assistance of cadence-SimVision ©. [6] Generated with the assistance of LabView 2010 from National Instruments©. Contact: Jonas Pistor, Institute of Electrodynamics and Microelectronics (ITEM.me) University of Bremen, Otto- Hahn-Allee, NW1, 28359, Bremen, Germany, +49 421 218- 62539 Email: pistor@me.uni-bremen.de 205
11-13 May, Aix-en-Provence, France PANEL DISCUSSION HERMETICITY TESTS IN MEMS Marc DESMULLIEZ, Heriot-Watt University Suzanne COSTELLO, MCS Ltd. Wolgang REINERT, Fraunhofer Institute for Silicon Technology Steven MARTELL, Sonoscan Inc. 206
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COLLECTION OF PAPERS PRESENTED AT T
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III
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V
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Table of Contents Wednesday 11 May
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PANEL DISCUSSION TEXTILE MICROSYSTE
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Friday 13 May SESSION C4: APPLICATI
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SPECIAL SESSION OF BIO-MEMS/NEMS a
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suspended membrane can be pulled to
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most likely due to not yet consider
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that detectors may measure the diff
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2) Cavity width effect To verify th
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Fig.9. Capacitive sensor output, Va
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The anode and cathode are connected
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! 11-13 May 2011, Aix-en-Provence,
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! TABLE 3 SUMMARY OF SELECTIVITIES
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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Fig. 14. Time history of the envelo
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We have reported that how base mode
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We assume that 11-13 May 2011, Aix
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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80˚C. Additionally, we looked into
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The XRD shows a peak above the 2θ
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fibers which define the electric co
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Figure 15. Key board input system.
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ρ = h 2∆α∆T + + E 1h 3 1 +E 2
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In recent years, the pipe flow moni
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Page 230 and 231: electrocardiogram. • The heart be
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Variable Description Value Crab-leg
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Membrane weight (mg) Fig. 4. Struct
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So far, the expected major contribu
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al. used a modified LIGA (German ac
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REFERENCES [1] G. Mehta, J. Lee, W.
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followed by titanium (Ti) which sho
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exposure dose, post exposure bake t
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#### ##/&### 3 # #
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*5%6,+/.,-,7-, ,+.,1/21* %
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B. Energy Applications Society is f
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Presently, the microfabrication pro
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[6] C. Richard, A. Renaudin, V. Aim
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NA sinθ c 11-13 May 2011, Aix-en-
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the waveguide on the fused silica,
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microphone diaphragm. The chosen CM
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TABLE V MICROPHONE CHARACTERISTICS
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Figure 7b shows the effect of a par
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over the temperature range (i.e. th
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given. This allows a CTM model to b
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the magic-Tee, and the coherent sig
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After analyzing the two conditions
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IV. MICRO FABRICATION For fabricati
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IV. A. Simulation and Sensitivity A
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grown to sub-confluence were washed
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Clamps rotation [21] Clamps transla
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Layout Total dimensions of the grip
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focusing increased both as the stre
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Time of diffusion (hr) 1200 1000 80
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Chip Magnet Light source Hot plate
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above, they would move to upward an
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This phenomenon is now reaching the
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C. Proof mass displacement Moreover
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The VerilogA block code is : 11-13
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Author Index Abi-Saab D. 81 Aimez V
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Nussbaum Dominic 273 O’Hara T. 35
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