Online proceedings - EDA Publishing Association
Online proceedings - EDA Publishing Association
Online proceedings - EDA Publishing Association
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11-13 <br />
May 2011, Aix-en-Provence, France<br />
<br />
Polymer-based Fabrication Techniques for Enclosed<br />
Microchannels in Biomedical Applications<br />
Annabel Krebs, Thorsten Knoll, Dominic Nussbaum, Thomas Velten<br />
Fraunhofer Institute for Biomedical Engineering<br />
Ensheimer Str. 48, 66386 St. Ingbert, Germany<br />
Abstract- Investigations and analyses of body fluids like<br />
serum or whole blood are essential tasks in biomedical<br />
research in order to understand and diagnose diseases, to<br />
conduct pharmacological tests or to culture cells. Therefore,<br />
microfluidic systems provide a favorable tool for processing<br />
fluid samples as they allow downscaling of sample volumes and<br />
handling of single fluid components such as cells or proteins.<br />
For this reason, we present simple fabrication techniques for<br />
microchannel systems using polymer materials only. On the<br />
one hand, these materials are low-priced compared to<br />
conventional silicon or glass. On the other hand, they do not<br />
show any interaction with biological fluids. Furthermore, their<br />
transparency guarantees an easy observability of all processes<br />
within the system. Depending on the channel dimensions,<br />
different adhesion bonding techniques for closing of the<br />
systems are applied, whereas the fluidic interfaces are<br />
included. Summing up, we provide complete fabrication<br />
processes for fluidic systems which are simpler and more costeffective<br />
than conventional methods and yet cope with all<br />
essential requirements for microfluidic applications.<br />
I. INTRODUCTION<br />
Microfluidic systems have become a common tool in<br />
research fields like analytical chemistry or biomedicine as<br />
miniaturized devices require only small material and sample<br />
volumes. Additionally, effects can be exploited which are<br />
only dominant in the micro range. For example,<br />
investigations on cells or other components in blood<br />
samples can be carried out in lab-on-chip systems as<br />
dimensions of the cells are in the same scale as the<br />
microchannels. In biomedicine, lab-on-chip systems have<br />
emerged to indispensable devices for the accomplishment of<br />
medical tests with body fluids or extractions from fluids.<br />
Besides, they also serve for cell handling and culturing,<br />
mixing of liquids, detection and analysis of diseases or for<br />
measuring quantitative amounts of components like glucose<br />
or hormones in blood [1-6].<br />
Depending on the applications of micro systems, certain<br />
requirements to the systems need to be met. In case of<br />
biomedical applications, the transparency of materials is<br />
often a vital aspect in order to be able to follow processes<br />
within the system channels or chambers. Moreover, the<br />
employed materials should not interact with the biological<br />
sample and channels should hold defined dimensions.<br />
Other general demands come along such as leak-proof<br />
closure of the channels and implementation of fluidic<br />
interfaces. Importantly, the whole fabrication procedure has<br />
to be affordable at the same time.<br />
Therefore, we present fabrication techniques for<br />
microfluidic systems with focus on biomedical applications,<br />
meeting the requirements named above. Based on acrylic<br />
glass substrates and the epoxy resists SU-8 and<br />
PerMX3020, reasonable cost of the materials is assured.<br />
These polymer materials are pellucid and do not show<br />
interactions with whole blood or blood components. As<br />
biocompatibility tests with SU-8 have not given cause for<br />
concern [7, 8], SU-8 is currently used in divers biological<br />
research fields [9, 10], although further biocompatibility<br />
studies might be advisable [8]. In Ref. [5], we introduced a<br />
manufacturing technique which also bases upon these<br />
polymer materials. Yet, the here presented, modified<br />
processes enable a wider choice of material combinations as<br />
well as enhanced fabrication reliability and yield.<br />
Additionally, we achieved to double the feasible aspect<br />
ratio.<br />
Hence, a simple fabrication technique for microchannels<br />
is presented which rests upon photolithography and polymer<br />
adhesion bonding. In doing so, very small channels with<br />
aspect ratios higher than 10:1 can be created. In contrast to<br />
conventional hybrid techniques for sealing of channels, we<br />
use different full wafer bonding methods depending on the<br />
channel dimensions. Unlike other working groups that have<br />
already presented high aspect ratios and full wafer adhesion<br />
bonding using silicon or glass substrates [11-13], we<br />
accomplish these processes on polymer substrates. Very<br />
cost-effective and simple structuring techniques can be<br />
applied to these substrates, e.g. fluidic interfaces can be<br />
implemented by mechanical drilling. More complicated,<br />
costly procedures like laser drilling, sand blasting, glass<br />
etching and substrate removals can be obviated. Altogether,<br />
we obtain a complete manufacturing procedure preferable<br />
for biomedical applications which outplays common silicon<br />
or glass techniques in terms of material and total costs. In<br />
comparison with other polymers like polydimethylsiloxane<br />
(PDMS), the presented techniques are adaptive for smaller<br />
channels and higher aspect ratios, thus they qualify for a<br />
wider range of applications.<br />
II.<br />
MATERIALS AND METHODS<br />
A. Materials<br />
1 mm thick 10 cm x 10 cm acrylic glass (polymethyl<br />
methaacrylate, PMMA) plates were used as substrate<br />
materials. Two different epoxy-based photoresists, SU-8<br />
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