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Online proceedings - EDA Publishing Association

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11-13 <br />

May 2011, Aix-en-Provence, France<br />

<br />

Polymer-based Fabrication Techniques for Enclosed<br />

Microchannels in Biomedical Applications<br />

Annabel Krebs, Thorsten Knoll, Dominic Nussbaum, Thomas Velten<br />

Fraunhofer Institute for Biomedical Engineering<br />

Ensheimer Str. 48, 66386 St. Ingbert, Germany<br />

Abstract- Investigations and analyses of body fluids like<br />

serum or whole blood are essential tasks in biomedical<br />

research in order to understand and diagnose diseases, to<br />

conduct pharmacological tests or to culture cells. Therefore,<br />

microfluidic systems provide a favorable tool for processing<br />

fluid samples as they allow downscaling of sample volumes and<br />

handling of single fluid components such as cells or proteins.<br />

For this reason, we present simple fabrication techniques for<br />

microchannel systems using polymer materials only. On the<br />

one hand, these materials are low-priced compared to<br />

conventional silicon or glass. On the other hand, they do not<br />

show any interaction with biological fluids. Furthermore, their<br />

transparency guarantees an easy observability of all processes<br />

within the system. Depending on the channel dimensions,<br />

different adhesion bonding techniques for closing of the<br />

systems are applied, whereas the fluidic interfaces are<br />

included. Summing up, we provide complete fabrication<br />

processes for fluidic systems which are simpler and more costeffective<br />

than conventional methods and yet cope with all<br />

essential requirements for microfluidic applications.<br />

I. INTRODUCTION<br />

Microfluidic systems have become a common tool in<br />

research fields like analytical chemistry or biomedicine as<br />

miniaturized devices require only small material and sample<br />

volumes. Additionally, effects can be exploited which are<br />

only dominant in the micro range. For example,<br />

investigations on cells or other components in blood<br />

samples can be carried out in lab-on-chip systems as<br />

dimensions of the cells are in the same scale as the<br />

microchannels. In biomedicine, lab-on-chip systems have<br />

emerged to indispensable devices for the accomplishment of<br />

medical tests with body fluids or extractions from fluids.<br />

Besides, they also serve for cell handling and culturing,<br />

mixing of liquids, detection and analysis of diseases or for<br />

measuring quantitative amounts of components like glucose<br />

or hormones in blood [1-6].<br />

Depending on the applications of micro systems, certain<br />

requirements to the systems need to be met. In case of<br />

biomedical applications, the transparency of materials is<br />

often a vital aspect in order to be able to follow processes<br />

within the system channels or chambers. Moreover, the<br />

employed materials should not interact with the biological<br />

sample and channels should hold defined dimensions.<br />

Other general demands come along such as leak-proof<br />

closure of the channels and implementation of fluidic<br />

interfaces. Importantly, the whole fabrication procedure has<br />

to be affordable at the same time.<br />

Therefore, we present fabrication techniques for<br />

microfluidic systems with focus on biomedical applications,<br />

meeting the requirements named above. Based on acrylic<br />

glass substrates and the epoxy resists SU-8 and<br />

PerMX3020, reasonable cost of the materials is assured.<br />

These polymer materials are pellucid and do not show<br />

interactions with whole blood or blood components. As<br />

biocompatibility tests with SU-8 have not given cause for<br />

concern [7, 8], SU-8 is currently used in divers biological<br />

research fields [9, 10], although further biocompatibility<br />

studies might be advisable [8]. In Ref. [5], we introduced a<br />

manufacturing technique which also bases upon these<br />

polymer materials. Yet, the here presented, modified<br />

processes enable a wider choice of material combinations as<br />

well as enhanced fabrication reliability and yield.<br />

Additionally, we achieved to double the feasible aspect<br />

ratio.<br />

Hence, a simple fabrication technique for microchannels<br />

is presented which rests upon photolithography and polymer<br />

adhesion bonding. In doing so, very small channels with<br />

aspect ratios higher than 10:1 can be created. In contrast to<br />

conventional hybrid techniques for sealing of channels, we<br />

use different full wafer bonding methods depending on the<br />

channel dimensions. Unlike other working groups that have<br />

already presented high aspect ratios and full wafer adhesion<br />

bonding using silicon or glass substrates [11-13], we<br />

accomplish these processes on polymer substrates. Very<br />

cost-effective and simple structuring techniques can be<br />

applied to these substrates, e.g. fluidic interfaces can be<br />

implemented by mechanical drilling. More complicated,<br />

costly procedures like laser drilling, sand blasting, glass<br />

etching and substrate removals can be obviated. Altogether,<br />

we obtain a complete manufacturing procedure preferable<br />

for biomedical applications which outplays common silicon<br />

or glass techniques in terms of material and total costs. In<br />

comparison with other polymers like polydimethylsiloxane<br />

(PDMS), the presented techniques are adaptive for smaller<br />

channels and higher aspect ratios, thus they qualify for a<br />

wider range of applications.<br />

II.<br />

MATERIALS AND METHODS<br />

A. Materials<br />

1 mm thick 10 cm x 10 cm acrylic glass (polymethyl<br />

methaacrylate, PMMA) plates were used as substrate<br />

materials. Two different epoxy-based photoresists, SU-8<br />

273

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