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The VerilogA block code is : 11-13 May 2011, Aix-en-Provence, France module generator_noise(a,b) input a; output b; electrical a, b; parameter real noise_generator=1e-10 from [0:inf); analog begin V(a,b)
The oscillator output phase noise calculated from the Leeson formula is then: S 2 2 1 ν 0 2 2en Rm f ) = 10log([1 ( ) ] ) 2 2 (18) f 2Q V R ϕ ( + 2 x f 11-13 May 2011, Aix-en-Provence, France 2. Flicker noise The flicker_noise function is also added into the transconductance amplifier plus pin. Flicker noise is directly visible on the output phase noise. The results are consistent with the Leeson effect. IV. CONCLUSION AND FUTURE WORK As a fundamental result, a MEMS oscillator model has been developed using the multiphysics Verilog-A language. This model includes the mechanical and piezoelectric equations, and the electronic circuitry. This description main asset lies in allowing the study of critical parameters influencing performances and especially the phase noise analysis. This model will be used to compare the influence on phase noise performances of different types of transduction (optical and electrostatic…) and other types of oscillator circuits as PLL oscillator circuit [7]. These values will also be compared with experimental results obtained with MEMS oscillators. REFERENCES [1] O. Le Traon, “The VIA Vibrating Beam Accelerometer: Concept and Performances”, Proceedings of the PLAN Symposium, 1998. [2] O. Le Traon, D. Janiaud, M. Pernice, S. Masson, S. Muller, J-Y Tridera, “A New Quartz Monolithic Differential Vibrating Beam Accelerometer”, Position, Location, And Navigation Symposium, pp.6-15, 2006 [3] Loreto Rodríguez-Pardo, “Sensitivity, Noise, and Resolution in QCM Sensors in Liquid Media”, IEEE Sensors Journal, vol.5, n°6, 2005 [4] O. Le Traon, “The VIA Vibrating Beam Accelerometer: Concept and Performances”, Proceedings of the PLAN Symposium, 1998. [5] D.B. Leeson “A simple model of feedback oscillator noise spectrum”, Proceedings of the IEEE, vol. 54, issue 2, p. 329-330, 1966. [6] E. Rubiola, R. Brendel “A generalization of the Leeson effect”, arXiv:1004.5539 [physics.ins-det], April 2010. [7] R. Levy, D. Janiaud, O. Le Traon, S. Muller, JP. Gilles, G. Raynaud, “A new analog oscillator electronics applied to a piezoelectric vibrating gyro”, Proceedings of the IEEE Frequency Control Symposium pp.326-329, 2004 Author Biography: Guillaume Papin is engineer from the ENSMM since 2010. He is currently a PhD student at ONERA working on the development of multi-physic models to improve phase noise performances of vibrating MEMS sensors. 397
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COLLECTION OF PAPERS PRESENTED AT T
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III
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V
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Table of Contents Wednesday 11 May
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PANEL DISCUSSION TEXTILE MICROSYSTE
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Friday 13 May SESSION C4: APPLICATI
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SPECIAL SESSION OF BIO-MEMS/NEMS a
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11-13 May 2011, Aix-en-Provence, Fr
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11-13 May 2011, Aix-en-Provence, F
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suspended membrane can be pulled to
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most likely due to not yet consider
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that detectors may measure the diff
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2) Cavity width effect To verify th
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Fig.9. Capacitive sensor output, Va
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11-13 May, 2011, Aix-en-Provence,
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The anode and cathode are connected
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! 11-13 May 2011, Aix-en-Provence,
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! TABLE 3 SUMMARY OF SELECTIVITIES
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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Fig. 14. Time history of the envelo
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We have reported that how base mode
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We assume that 11-13 May 2011, Aix
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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11-13 May, Aix-en-Provence, France
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80˚C. Additionally, we looked into
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The XRD shows a peak above the 2θ
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fibers which define the electric co
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Figure 15. Key board input system.
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ρ = h 2∆α∆T + + E 1h 3 1 +E 2
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In recent years, the pipe flow moni
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As the speed of the rotor increases
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inches silicon wafers which have th
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samples tested in different vacuum
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l c 11-13 May 2011, Aix-en-Provence
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Vp (V) 3,5 3,0 2,5 2,0 1,5 1,0 0,5
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II. MATHEMATICAL MODEL AND NUMERICA
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fluids travel along a curved channe
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measured mixing indices are depicte
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length, which enables them to focus
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however, a rotation for coincidence
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excludes the nature of the fixed bo
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Using the radial and tangential mid
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Now the challenge in data handling
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value of every active channel. Ther
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electrocardiogram. • The heart be
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In our work, we proposed an innovat
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Fig. 8 Concept of the in-home perso
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found that the early-stage diagnosi
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Power monitoring data detected by w
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device consisted of a bimorph canti
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where C others is the capacitance o
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operation, the pressure inside the
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increased. 11-13 May 2011, Aix-en-
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coefficient compatible with the mic
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Variable Description Value Crab-leg
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Membrane weight (mg) Fig. 4. Struct
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So far, the expected major contribu
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al. used a modified LIGA (German ac
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REFERENCES [1] G. Mehta, J. Lee, W.
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followed by titanium (Ti) which sho
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exposure dose, post exposure bake t
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#### ##/&### 3 # #
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*5%6,+/.,-,7-, ,+.,1/21* %
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B. Energy Applications Society is f
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Presently, the microfabrication pro
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[6] C. Richard, A. Renaudin, V. Aim
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NA sinθ c 11-13 May 2011, Aix-en-
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the waveguide on the fused silica,
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microphone diaphragm. The chosen CM
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TABLE V MICROPHONE CHARACTERISTICS
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Figure 7b shows the effect of a par
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over the temperature range (i.e. th
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given. This allows a CTM model to b
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the magic-Tee, and the coherent sig
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After analyzing the two conditions
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IV. MICRO FABRICATION For fabricati
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