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Author Index Abi-Saab D. 81 Aimez Vincent 300 Aini Md Ralib Aliza 85 Akarvardar K. 348 Allen David M. 29 Angelescu D. 81 Anis Nurashikin Nordin 18, 85 Ardila G. 348 Asgari M.B. 3, 103 Ayon Arturo 72, 137, 185 Azaïs F. 14 Ballet Jérôme 249 Bancaud Aurélien 241 Bartolucci Giancarlo 263 Basset P. 81 Begbie M. 253 Bendali A. 378 Bergonzo P. 378 Berthillier Marc 187 Boisseau Sébastien 386 Bongrain A. 378 Bornoff Robin 324 Bosch Robert 1 Bossuyt Remy 249 Bouchaud Jérémie 211 Bourouina T. 81 Boutaud Bertrand 386 Bouteloup G. 348 Brisard Thierry 211 Brown Keith 41 Brusa Eugenio 356 Buser R. 128 Camon Henri 241, 249 Cano Jean-Paul 249 Chabanov Andrey 72, 185 Chaehoi A. 253 Chaillout Jean-Jacques 386 Chang Ho-Hsien 352 Chang Pei Hua 151 Chang Ting-Chou 245, 305 Chang Tung-Yu 294 Chao Ching-Kong 176 Charlot Benoît 134 Charrette Paul G. 300 Chatani Keisuke 338 Chau Lai-Kwan 245, 305 Chen Chien-Hsing 245, 305 Chen Chonglin 72, 185 Chen Chun Huei 170 Chen Guan-Lan 159 Chen Jyh Jian 170 Chen Taco 329 Cheng Ya-Chi 159 Chuang Cheng-Hsin 122 Collins Greg 72 Combette Philippe 134 Conédéra Véronique 249 Corigliano Alberto 53 Costello Suzanne 206, 208 Dalmolin Renzo 386 Dany Maximilien 29 Dauksevicius Rolanas 164 De Angelis Giorgio 263 De Pasquale Giorgio 97, 356 Delabie Christophe 193 Desmulliez Marc P.Y. 41, 110, 206, 207 Deterre Martin 386 Dinglreiter Heinz 277 Dovhij Victor 184 Drysdale D. 35 Dufour-Gergam Elisabeth 386 Dumas Norbert 14, 315, 320 Eftekhar Azam Saeed 53 Elam David 72, 185 Esteves Josué 309 Exertier Anne 193 Fakri Abdenasser 193 Fakri-Bouchet Latifa 193 Flourens F. 81 Flynn David 41 Fujimori Tsukasa 237 Fujimoto Akifumi 333 Fujimoto Jun 227 Garcia Ronald 151 Garraud Alexandra 134 Ghisi Aldo 53 Giani Alain 134 Goto Yasushi 237 Gué Anne-Marie 249 Gyenge Oliver 46 Hacine Souha 320 Hackworth R. 137 Hansen Ulli 46 Hauck Karin 46 398
Heeb P. 128 Heilig Markus 283 Hinchet R. 348 Ho Jing-Yu 23 Hodossy Sandor 324 Hoeffmann Janpeter 200 Holota Victor 184 Hosoi Atsushi 333 Howe R. T. 348 Hsiao Fei-Bin 362 Hsiao Ju-Hsiu 156 Hsu Jen-Sung 294 Hsu Shan-Shan 294 Huang Cheng-Chun 372 Huang Yi-Hsuan 122 Hui Hui 59 Hung Ling-Hsuan 366 Iamoni Sonia 97 Ikehara Tsuyoshi 338 Imamoto Hiroshi 237 Isagawa Kohei 231 Ishida Takao 180 Itao Kiyoshi 212 Itoh Toshihiro 142, 217, 221, 227, 231, 237 Jen Chun-Ping 156, 352, 362 Ju Yang 333 Kaminaga Susumu 288 Karam Jean Michel 211 Kaufmann Jens G. 41 Kay Robert W. 110 Khan Malek Chantal 278 Khan Sheroz 18 Knechtel Roy 106, 344 Knoll Thorsten 273 Kobayashi Takeshi 142, 221, 231 Kogut Igor 184 Köhler Andreas 64 Kolew Alexander 277, 283 Kotha R. 137 Krebs Annabel 273 Kulvietis Genadijus 164 Kurata, Hideaki 237 Lardiès Joseph 187 Latorre Laurent 315, 320 Lee Chai-Yu 245, 305 Lee Chungda 90 Lee Shin-Li 122 Lee Yung-Chun 362 Lefeuvre Elie 258, 386 Leib Juergen 46 Lenczner Michel 59 Leprince-Wang Y. 81 Levy R. 392 Lin Ming-Je 268 Lin Ming-Tzer 159, 329 Lin Tsung-Hung 176 Lissorgues G. 378, 392 Liu Ming 72 Liu Yao-Lung 366 Loisel Pierre 134 Lu Guo-Neng 300 Lu Jian 217 Lucibello Andrea 263 Ma Chunrui 72 Maeda Ryutaro 180, 217, 227, 231, 237, 338 Mailly F. 14 Mailly Frederick 320 Malak M. 81 Marcelli Romolo 263 Marek Jiri 1 Mariani Stefano 53 Markus Heilig 277 Maroufi M. 3 Martel Stéphane 300 Martell Steven R. 206, 210 Martincic Emile 258 Marty F. 81 Masmoudi M. 14 Maus Simon 46 Maxwell R. 137 Mazenq Laurent 249 Megherbi Souhil 258 Metwally Khaled 278 Mezghani B. 14 Mias Solon 241 Michael Steffen 106, 344 Michaelsen J. A. 116 Milasauskaite Ieva 164 Mirabbaszadeh K. 103 Miyake Koji 142 Montès L. 348 Moriera J. R. 137 Moulin Johan 258 MuÅNnch Daniel 283 Nayebi P. 103 Nemashkalo Anastasiia 185 Neylon Sean 211 Nguyen K.N 81 Niessner Martin 8 Nouet Pascal 14, 315, 320 399
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COLLECTION OF PAPERS PRESENTED AT T
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III
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V
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Table of Contents Wednesday 11 May
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PANEL DISCUSSION TEXTILE MICROSYSTE
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Friday 13 May SESSION C4: APPLICATI
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SPECIAL SESSION OF BIO-MEMS/NEMS a
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11-13 May 2011, Aix-en-Provence, Fr
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11-13 May 2011, Aix-en-Provence, F
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suspended membrane can be pulled to
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most likely due to not yet consider
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that detectors may measure the diff
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2) Cavity width effect To verify th
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Fig.9. Capacitive sensor output, Va
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11-13 May, 2011, Aix-en-Provence,
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The anode and cathode are connected
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11-13 May , 2011 , Aix-en-Provence,
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! 11-13 May 2011, Aix-en-Provence,
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! 11-13 May 2011, Aix-en-Provence,
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! TABLE 3 SUMMARY OF SELECTIVITIES
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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Fig. 14. Time history of the envelo
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We have reported that how base mode
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We assume that 11-13 May 2011, Aix
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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11-13 May, Aix-en-Provence, France
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80˚C. Additionally, we looked into
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The XRD shows a peak above the 2θ
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fibers which define the electric co
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Figure 15. Key board input system.
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ρ = h 2∆α∆T + + E 1h 3 1 +E 2
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In recent years, the pipe flow moni
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As the speed of the rotor increases
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inches silicon wafers which have th
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samples tested in different vacuum
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l c 11-13 May 2011, Aix-en-Provence
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Vp (V) 3,5 3,0 2,5 2,0 1,5 1,0 0,5
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II. MATHEMATICAL MODEL AND NUMERICA
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fluids travel along a curved channe
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measured mixing indices are depicte
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length, which enables them to focus
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however, a rotation for coincidence
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excludes the nature of the fixed bo
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Using the radial and tangential mid
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Now the challenge in data handling
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value of every active channel. Ther
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electrocardiogram. • The heart be
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In our work, we proposed an innovat
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Fig. 8 Concept of the in-home perso
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found that the early-stage diagnosi
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Power monitoring data detected by w
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device consisted of a bimorph canti
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where C others is the capacitance o
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operation, the pressure inside the
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increased. 11-13 May 2011, Aix-en-
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coefficient compatible with the mic
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Variable Description Value Crab-leg
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Membrane weight (mg) Fig. 4. Struct
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So far, the expected major contribu
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al. used a modified LIGA (German ac
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REFERENCES [1] G. Mehta, J. Lee, W.
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followed by titanium (Ti) which sho
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exposure dose, post exposure bake t
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#### ##/&### 3 # #
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*5%6,+/.,-,7-, ,+.,1/21* %
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B. Energy Applications Society is f
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Presently, the microfabrication pro
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[6] C. Richard, A. Renaudin, V. Aim
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NA sinθ c 11-13 May 2011, Aix-en-
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the waveguide on the fused silica,
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microphone diaphragm. The chosen CM
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TABLE V MICROPHONE CHARACTERISTICS
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Figure 7b shows the effect of a par
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over the temperature range (i.e. th
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given. This allows a CTM model to b
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the magic-Tee, and the coherent sig
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After analyzing the two conditions
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IV. MICRO FABRICATION For fabricati
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IV. A. Simulation and Sensitivity A
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