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Success in MEMS, "From DRIE Technology to Social Innovation" Susumu Kaminaga, Sumitomo Precision Products Co., Ltd I. INTRODUCTION Over the past 10 years MEMS devices have become more established in a number of commercial, high volume applications such as digital projectors, ink jet printers, and automotive motion sensors. The invention of the mobile phone has had an enormous effect on society in terms of interpersonal communications and working life. The demand for “smarter” consumer products (e.g. smart phones, handheld tablets, and gaming consoles) in the past 2-3 years has stimulated significant growth in manufacturing MEMS devices for mobile applications [1] . Meanwhile, more MEMS devices are emerging with the potential for beneficial applications in other areas such as life sciences and energy conservation. For example, Yole Développement forecasts, “microsystem technologies market for healthcare applications will grow from $1.2B in 2009 to $4.5B in 2015, representing over 1B units per year in 2015” [2] . II. DEEP REACTIVE ION ETCH Deep reactive ion etching (DRIE) is a key enabling process which has been adopted by the MEMS manufacturers for etching deep, high aspect ratio features into silicon, the most common material used for MEMS manufacturing. Feature sizes range from sub-micron to many hundreds of microns. SPP Process Technology Systems (SPTS) was the first equipment manufacturer to commercialise DRIE, also named the “Bosch Process”, over 15 years ago, when the MEMS industry was in its infancy. Fig 1 – Schematic diagram illustrating the process steps of the DRIE process III. EMERGING MEMS APPLICATIONS A. Wireless networking A Wireless Sensor Network (WSN) consists of spatially distributed autonomous sensors to monitor physical or environmental conditions, such as temperature, sound, vibration, pressure, motion or pollutants, and to cooperatively pass their data through the network to a main location. Some networks are bi-directional, allowing the system to control the activity of the sensors. Although the development of wireless sensor networks was motivated by military applications such as battlefield surveillance; today such networks are used in many industrial and consumer application, such as industrial process monitoring and control, machine health monitoring, environment and habitat monitoring, home automation, and traffic control. MEMS sensors can be designed to measure a wide range of conditions at each node and are small, reliable and easily integrated into an electronic system. MEMS may also be used to scavenge energy to re-charge batteries which maintain power at the individual nodes. Fig 2 Multi-hopping Ad-hoc Wireless Network concept (Courtesy of Crossbow/SPP) 288
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COLLECTION OF PAPERS PRESENTED AT T
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III
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V
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Table of Contents Wednesday 11 May
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PANEL DISCUSSION TEXTILE MICROSYSTE
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Friday 13 May SESSION C4: APPLICATI
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SPECIAL SESSION OF BIO-MEMS/NEMS a
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11-13 May 2011, Aix-en-Provence, Fr
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11-13 May 2011, Aix-en-Provence, F
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suspended membrane can be pulled to
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most likely due to not yet consider
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that detectors may measure the diff
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2) Cavity width effect To verify th
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Fig.9. Capacitive sensor output, Va
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11-13 May, 2011, Aix-en-Provence,
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The anode and cathode are connected
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11-13 May , 2011 , Aix-en-Provence,
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! 11-13 May 2011, Aix-en-Provence,
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! TABLE 3 SUMMARY OF SELECTIVITIES
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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Fig. 14. Time history of the envelo
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We have reported that how base mode
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We assume that 11-13 May 2011, Aix
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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11-13 May, Aix-en-Provence, France
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80˚C. Additionally, we looked into
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The XRD shows a peak above the 2θ
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fibers which define the electric co
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Figure 15. Key board input system.
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ρ = h 2∆α∆T + + E 1h 3 1 +E 2
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In recent years, the pipe flow moni
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As the speed of the rotor increases
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inches silicon wafers which have th
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samples tested in different vacuum
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l c 11-13 May 2011, Aix-en-Provence
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Vp (V) 3,5 3,0 2,5 2,0 1,5 1,0 0,5
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II. MATHEMATICAL MODEL AND NUMERICA
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fluids travel along a curved channe
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measured mixing indices are depicte
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length, which enables them to focus
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however, a rotation for coincidence
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excludes the nature of the fixed bo
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Using the radial and tangential mid
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Now the challenge in data handling
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value of every active channel. Ther
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electrocardiogram. • The heart be
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In our work, we proposed an innovat
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Fig. 8 Concept of the in-home perso
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found that the early-stage diagnosi
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Power monitoring data detected by w
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device consisted of a bimorph canti
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where C others is the capacitance o
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Page 292 and 293: REFERENCES [1] G. Mehta, J. Lee, W.
Page 296 and 297: followed by titanium (Ti) which sho
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Page 304 and 305: B. Energy Applications Society is f
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After analyzing the two conditions
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IV. MICRO FABRICATION For fabricati
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IV. A. Simulation and Sensitivity A
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grown to sub-confluence were washed
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Clamps rotation [21] Clamps transla
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Layout Total dimensions of the grip
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focusing increased both as the stre
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Time of diffusion (hr) 1200 1000 80
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Chip Magnet Light source Hot plate
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above, they would move to upward an
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This phenomenon is now reaching the
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C. Proof mass displacement Moreover
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The VerilogA block code is : 11-13
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Author Index Abi-Saab D. 81 Aimez V
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Nussbaum Dominic 273 O’Hara T. 35
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