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11-13 May 2011, Aix-en-Provence, France PANEL DISCUSSION HIGH ADDED VALUE MEMS Jérémie BOUCHAUD, Director - Principal Analyst MEMS & Sensors, IHS iSuppli, Munich, Germany Jean Michel KARAM, Chairman & CEO, MEMSCAP, Bernin, France Sean NEYLON, CEO, Colibrys, Neuchâtel, Switzerland Thierry BRISARD, CEO, NEOSENS, Toulouse, France ABSTRACT: High-value MEMS as sensors and actuators for applications that are outside the high-volume consumer electronics and automotive volume markets, addressing the industrial, medical, energy, optical telecom and aerospace-defense market segments. According to iSuppli's five-year forecast, high-value MEMS revenue will hit $2.6 billion in 2014. This rapid growth is being driven by the value proposition brought by the MEMS devices to many systems and applications. The panel will start by an overview of the high added value MEMS market, followed by several case studies from active players in this market. 211
11-13 May 2011, Aix-en-Provence, France Integrated Sensing Systems for Health and Safety Kiyoshi Itao Tokyo University of Science 2-6 Kagurazaka, Shinjuku-ku Tokyo, 162-0825, Japan Toshihiro Ito Advanced Industrial Science and Technology 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan Abstract- Information and communication services have been developed from the first generation of fixed phone era to the second generation of cellular phone era, and eventually the third generation will be developed as the era of keyboard-less and wireless sensor terminals. Recently, with the technology weaving of microsensors, wearable computers and wireless systems, various micro sensing systems have been developed. In the near future, with more progress in nanotechnologies, flexible sensors, flexible power supplies, flexible computers and flexible displays will be developed, and every terminal will become wearable. From this viewpoint, we would like to explain the novel technologies and services in the third generation network. In details, we introduce Human Recorder System development in our NPO-WIN (Wearable Information Network http://www.npowin.org/j/) I. INTRODUCTION With the recent technology weaving of microsensors, wearable computers and wireless systems, various microsensing systems have been developed. The nanotechnologies will lead to the rapid progress of flexible sensors, flexible power supplies, flexible computers and flexible displays. Every terminal will become wearable in the near future, and textile in the future on the basis of nanotechnologies as shown Fig. 1. The nature interfacer is core device of such a new sensor communication system that can capture various kinds of information using microsensors, process data recognition by one clip computers, and transmit information by wireless technologies. The key technology here is the software to automatically decide whether to stay active or to become sleep to save energy, as well as the relevant hardware technologies. The smaller these nature interfacers become, the more their application range will be expanded, for example from an airplane to a small bird. In this paper, we will present three fundamental ideas, firstly the concept of nature interface, secondly wearable information technologies, and thirdly examples of typical applications, such as Human Recorder System by NPO-WIN (Wearable Information Network http://www.npowin.org ). In conclusion, we will discuss future information communication systems utilizing human vital information. II. AIMING AT THE HARMONY BASED ON SENCER INFORMATION COMMUNICATION The present telecommunication network system is of human-centered, as shown in Fig.2. The nature system is completely separated from the artifacts system. Only a small portion of the huge nature (real world) information is incorporated info this system because of poor sensing technology. In contrast, what we have advocated is a new telecommunication system called “sensor communication system,” which could make it possible to gather a huge amount of information from nature, including both animals and plants, as well as information from artifacts (Fig.3). It would be an information communication system with a thick information input pipe, and various sensor groups. It could be also the system that can monitor the state of nature and artifacts concisely and widely. Such technologies could become the foundation for the progress of science to general and transdisciplinary science. Fig. 1 Mt. Fuji of Technology 212
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COLLECTION OF PAPERS PRESENTED AT T
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III
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V
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Table of Contents Wednesday 11 May
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PANEL DISCUSSION TEXTILE MICROSYSTE
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Friday 13 May SESSION C4: APPLICATI
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SPECIAL SESSION OF BIO-MEMS/NEMS a
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suspended membrane can be pulled to
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most likely due to not yet consider
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that detectors may measure the diff
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2) Cavity width effect To verify th
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Fig.9. Capacitive sensor output, Va
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11-13 May, 2011, Aix-en-Provence,
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The anode and cathode are connected
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! 11-13 May 2011, Aix-en-Provence,
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! TABLE 3 SUMMARY OF SELECTIVITIES
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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Fig. 14. Time history of the envelo
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We have reported that how base mode
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We assume that 11-13 May 2011, Aix
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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11-13 May, Aix-en-Provence, France
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80˚C. Additionally, we looked into
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The XRD shows a peak above the 2θ
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fibers which define the electric co
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Figure 15. Key board input system.
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ρ = h 2∆α∆T + + E 1h 3 1 +E 2
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In recent years, the pipe flow moni
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As the speed of the rotor increases
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Page 230 and 231: electrocardiogram. • The heart be
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Membrane weight (mg) Fig. 4. Struct
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So far, the expected major contribu
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al. used a modified LIGA (German ac
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REFERENCES [1] G. Mehta, J. Lee, W.
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followed by titanium (Ti) which sho
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exposure dose, post exposure bake t
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#### ##/&### 3 # #
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*5%6,+/.,-,7-, ,+.,1/21* %
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B. Energy Applications Society is f
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Presently, the microfabrication pro
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[6] C. Richard, A. Renaudin, V. Aim
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NA sinθ c 11-13 May 2011, Aix-en-
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the waveguide on the fused silica,
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microphone diaphragm. The chosen CM
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TABLE V MICROPHONE CHARACTERISTICS
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Figure 7b shows the effect of a par
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over the temperature range (i.e. th
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given. This allows a CTM model to b
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the magic-Tee, and the coherent sig
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After analyzing the two conditions
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IV. MICRO FABRICATION For fabricati
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IV. A. Simulation and Sensitivity A
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grown to sub-confluence were washed
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Clamps rotation [21] Clamps transla
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Layout Total dimensions of the grip
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focusing increased both as the stre
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Time of diffusion (hr) 1200 1000 80
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Chip Magnet Light source Hot plate
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above, they would move to upward an
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This phenomenon is now reaching the
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C. Proof mass displacement Moreover
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The VerilogA block code is : 11-13
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Author Index Abi-Saab D. 81 Aimez V
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Nussbaum Dominic 273 O’Hara T. 35
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