Online proceedings - EDA Publishing Association

11-13
May 2011, Aix-en-Provence, France
description of the contact phase, accurate, physics-based
damping models are a prerequisite for reliable and predictive
modeling of MEMS actuators. An on-going comparative study
given in [9] demonstrates this impressively. Future research
will therefore focus on the physics during the impact of the
membrane and how it can be captured in a system-level
macromodel. Additionally, systematic experimental and
theoretical investigations on viscous damping in the rarefied
gas regime have to be carried out in order to gain a better data
base and, thus, a better understanding of the underlying physics
in order to include this effect correctly in our models.
[1] J. Iannacci, F. Giacomozzi, S. Colpo, B. Margesin and M. Bartek,
“A General Purpose Reconfigurable MEMS-Based Attenuator for
Radio Frequency and Microwave Applications”, in Conf. Proc. of
EUROCON, 2009, pp: 1201-1209
[2] G. Schrag, R. Khaliliyulin, M. Niessner, and G. Wachutka,
“Hierarchical Modeling Approach for Full-System Design and
control of Microelectromechanical Systems,” in Conf. Proc. of
Eurosensors XXII, 2008, pp. 528-531.
[3] L. Gabbay, J. Mehner, and S. Senturia, “Computer-aided
generation of reducedorder dynamic macromodels - I:
Geometrically linear motion,” J. Microelectromechanical Systems,
vol. 9, 2000, pp. 262–269.
[4] Schrag G., and Wachutka G., “Physically based modeling of
squeeze film damping by mixed-level system simulation,” Sensors
and Actuators A, vol. 97-98; 2002 , pp. 193–200.
[5] R. Sattler, “Physikalisch basierte Mixed-Level Modellierung von
gedämpften elektromechanischen Systemen“, Shaker Verlag,
Aachen, 2007.
[6] M. Niessner, et al., “Experimentally validated and automatically
generated multi-energy domain coupled model of a RF-MEMS
switch”, Proc. EuroSimE 2009, Delft, NL, April 27-29, 2009, pp.
595-600.
[7] M. Niessner, G. Schrag, G. Wachtuka and J. Iannacci, “Modeling
and fast simulation of RF-MEMS switches within standard IC
design framework,” Proc. SISPAD 2010, Bologna, Italy,
September 6-8, 317-320 (2010).
[8] L. del Tin, et al., Digest Tech. Papers of 14 th Int. Conf. on Solidstate
Sensors, Actuators and Microsystems (Transducers’07),
Lyon, June 10-14, pp.635-638, 2007..
[9] M. Niessner, G. Schrag, J. Iannacci, G. Wachutka, “Mixed-level
modeling of squeeze film damping in MEMS: Simulation and
pressure-dependent experimental validation, accepted for
publication at 16 th Int. Conf. on Solid-state Sensors, Actuators and
Microsystems (Transducers’11), Beijing, China, June 5-9, 2011.
[10] J. Iannacci, R. Gaddi and A. Gnudi,, “Experimental Validation of
Mixed Electromechanical and Electromagnetic Modeling of RF-
MEMS Devices Within a Standard IC Simulation Environment,”
Journal of Microelectromechanical Systems 19 (3), 526-537
(2010).
[11] Coventor, Inc. [Coventorware Architect Version 2008.10
Reference] (2008).
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