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IV. MICRO FABRICATION For fabricating the above mechanically-coupled beam-shaped resonator arrays, an SOI (silicon on insulator) wafer with a 2.5-μm-thick top silicon layer, 300-nm-thick SiO 2 layer, and 400-μm-thick silicon substrate was used as a starting material, as shown in Fig. 6. Fig. 6. Typical process chart for the coupled bema-shaped resonator array system. The topside silicon was first thinned to 500 nm by reactive ion etching (RIE) using SF 6 , and then patterned by lithography and etched using a deep reactive ion etching (deep RIE) to form the mechanically-coupled cantilever pattern. The substrate silicon was isotropically etched by RIE through the etching window of insulating SiO 2 . The coupled cantilever structures were released by wet etching of SiO 2 in HF and following supercritical point drying. Several resonator arrays are fabricated with micromechanically-coupled overhangs (design No. 4), as typically shown in Fig. 7. Fig. 7. Typical micrograph of the fabricated coupled 5-resonator arrays. Spectrum Analysis Function Generater TV monitor Laser Doppler Oscillator PZT Plate CCD Vacuum (~7.5Pa) Fig. 8. Experimental setup for vibration mode localization characterizations. Lens 1 2 3 4 5 11-13 May 2011, Aix-en-Provence, France V. PRELIMINARY CHARACTERIZATIONS All measurements were performed in a vacuum of ~7.5 Pa at room temperature, as shown in Fig. 8. The sample was mounted on a piezoelectric ceramic plate, which can be vibrated by applying an AC voltage using a signal generator. The vibration of the cantilevers was measured using a laser Doppler system. The frequency responses were measured using frequency counters. The measured resonant frequency and corresponding amplitude under vibration mode localization has been typically shown in Fig. 9 for cantilever No.5. It can be seen that the amplitude response (12.7 dBm) was greatly magnified by vibration mode localization when driven by its resonant frequency of 209.50 kHz. As summarized in Fig. 10, although cantilevers No.3, No.4, and No.5 show the same resonant frequency of 209.50 kHz and are thus believed to be fabricated geometrically perfect, cantilever No.5 is connected by one coupling overhang rather than two like the others. This is the only different point among the above three cantilevers and might account for why cantilever No.5 displays a relatively great amplitude by vibration mode localization. Therefore, cantilever No.5 is suitable to be used as a detecting cantilever, and the neighbored cantilever No.4 can then be used as a sensing one for adding a small mass perturbation. A similar result can also be observed between cantilever No.1 and No.2, which needs further studied. However, micro-fabrication errors will inevitably cause differences in the cantilevers. Amplitude (dB) Vibration power [dBm] 10 0 - 10 - 20 - 30 - 40 - 50 - 60 - 70 - 80 - 90 Cantilever No.5 Driving frequency [kHz] Fig. 9. The amplitude response (12.70 dBm) of cantilever No. 5 was greatly magnified by vibration mode localization when driven by its resonant frequency of 209.50 kHz. 15 10 5 0 -5 -10 -15 209 0 1 2 3 4 5 6 210.5 209.5 Cantilever's number Fig. 10. The amplitude response and the resonant frequency corresponding to cantilever’s number summarized from the measurements typically shown in the above Fig. 9. 1st 2nd 3rd Ave Freq 211 210 Frequency (kHz) 342
VI. CONCLUSIONS The structural design of coupled beam-shaped resonator arrays to achieve a 5 times (compared to single resonator) of amplitude enhancement has been performed theoretically. The effect of different geometrical designs of the coupling overhang on the relative change (%) of amplitude shifts has been studied for each vibration mode before and after a small mass perturbation of 10 pg. A preliminary characterization using a micro-fabricated 5-resonator array without a small mass perturbation has been further conducted. The measured amplitude response (12.7 dBm) of cantilever No. 5 was greatly enhanced by vibration mode localization and can thus be used as the detecting cantilever, while the neighbored cantilever No.4 can then be used as the sensing one for next examination. ACKNOWLEDGEMENT Part of this work was supported by MEMS Inter University Network and performed in the Ubiquitous MEMS & Micro Engineering Research Center (UMEMSME) of National Institute of Advanced Industrial Science & Technology (AIST). 11-13 May 2011, Aix-en-Provence, France REFERENCES [1] K. L. Ekinci, X. M. H. Huang, and M. L. Roukes, Appl. Phys. Lett. 84, 4469, 2004. [2] T. Ono, X. Li, H. Miyashita, and M. Esashi, Rev. Sci. Instrum. 74, 1240, 2003. [3] Z. Davis and A. Boisen, Appl. Phys. Lett. 87, 013102, 2005. [4] H. Sone, Y. Fujinuma, and S. Hosaka, Jpn. J. Appl. Phys. Part 1 43, 3648, 2004. [5] B. Ilic, D. Czaplewski, M. Zalalutdinov, and H. G. Craighead, J. Vac. Sci. Technol. B 19, 2825, 2001. [6] M. Spletzer, A. Raman, A.Q. Wu, X. Xu, and R. Reifenberger, Appl. Phys. Lett. 88, 254102, 2006. [7] M. Spletzer, A. Raman, H. Sumali and J.P. Sullivan, Appl. Phys. Lett., 92, 114102, 2008. [8] P. W. Anderson. Phys. Rev. 109, 1492, 1958. [9] C. Pierre, D. M. Tang, and E. H. Dowell, AJAAJ. 25, 1249, 1987. [10] O. O. Bendiksen, AJAAJ. 25, 1492, 1987. [11] M. Sato, B. E. Hubbard, A. J. Sievers, B. Ilic, D. A. Czaplewski, and H. G. Craighead, Phys. Rev. Lett. 90, 044102, 2003. [12] E. Buks and M. L. Roukes, J. Microelectromech. Syst. 11, 802, 2002. [13] M. Napoli, W. H. Zhang, K. Turner, and B. Bamieh, J. Microelectromech. Syst. 14, 295, 2005. [14] L. Nicu and C. Bergaud. J. Micromech. Microeng. 14, 727, 2004. [15] A. Qazi, D. Nonis, A. Pozzato, M. Tormen, M. Lazzarino, S. Carrato, and G. Scoles, Appl. Phys. Lett. 90, 173118, 2007. 343
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COLLECTION OF PAPERS PRESENTED AT T
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III
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V
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Table of Contents Wednesday 11 May
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PANEL DISCUSSION TEXTILE MICROSYSTE
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Friday 13 May SESSION C4: APPLICATI
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SPECIAL SESSION OF BIO-MEMS/NEMS a
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suspended membrane can be pulled to
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most likely due to not yet consider
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that detectors may measure the diff
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2) Cavity width effect To verify th
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Fig.9. Capacitive sensor output, Va
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The anode and cathode are connected
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! TABLE 3 SUMMARY OF SELECTIVITIES
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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Fig. 14. Time history of the envelo
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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80˚C. Additionally, we looked into
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The XRD shows a peak above the 2θ
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fibers which define the electric co
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Figure 15. Key board input system.
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ρ = h 2∆α∆T + + E 1h 3 1 +E 2
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In recent years, the pipe flow moni
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inches silicon wafers which have th
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samples tested in different vacuum
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l c 11-13 May 2011, Aix-en-Provence
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Vp (V) 3,5 3,0 2,5 2,0 1,5 1,0 0,5
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II. MATHEMATICAL MODEL AND NUMERICA
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fluids travel along a curved channe
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measured mixing indices are depicte
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length, which enables them to focus
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Now the challenge in data handling
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value of every active channel. Ther
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electrocardiogram. • The heart be
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found that the early-stage diagnosi
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device consisted of a bimorph canti
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operation, the pressure inside the
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coefficient compatible with the mic
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Variable Description Value Crab-leg
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al. used a modified LIGA (German ac
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REFERENCES [1] G. Mehta, J. Lee, W.
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followed by titanium (Ti) which sho
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exposure dose, post exposure bake t
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*5%6,+/.,-,7-, ,+.,1/21* %
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The VerilogA block code is : 11-13
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Author Index Abi-Saab D. 81 Aimez V
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Nussbaum Dominic 273 O’Hara T. 35
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