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Friday 13 May SESSION C4: APPLICATIONS I large area adaPTaTive fluidiC lens ..............................................................................................................241 Solon Mias, Aurélien Bancaud , Henri Camon faBriCaTion and CharaCTerisTiCs of a fused siliCa-Based oPTiCal waveguide wiTh feMToseCond fiBer laser Pulses . ..........................................................................................................245 Ting-Chou Chang, Chien-Hsing Chen, Wei-Hung Shih, Jian-Neng Wang, Chai-Yu Lee, Jaw-Luen Tang, Shau-Chun Wang, Lai-Kwan Chau, Wei-Te Wu a MulTilevel PolyMer ProCess for liquid direCT enCaPsulaTion for oPTo-fluidiC aPPliCaTion . .............................................................................................249 Remy Bossuyt, Laurent Mazenq, Véronique Conédéra, Jérôme Ballet, Anne-Marie Gué, Jean-Paul Cano, Henri Camon MulTiPle-ouTPuT MeMs dC/dC ConverTer ......................................................................................................253 A. Chaehoi, M. Begbie, D. Weiland, S. Scherner design of The siliCon MeMBrane of high fideliTy and high effiCienCy MeMs MiCrosPeaker .......258 Iman Shahosseini, Elie Lefeuvre, Emile Martincic, Marion Woytasik, Johan Moulin, Souhil Megherbi, Romain Ravaud, Guy Lemarquand ModulaTion insTaBiliTy in rf MeMs deviCes . ...............................................................................................263 Romolo Marcelli, Giancarlo Bartolucci, Giorgio De Angelis, Andrea Lucibello, Emanuela Proietti SESSION T4: EMBOSSING AND MOULD sTudy of sCreen-PrinTing MiCrolens array using eleCTroforMing Molds ....................................268 Ming-Je Lin, Hsiharng Yang, Feng-Tsai Weng PolyMer-Based faBriCaTion TeChniques for enClosed MiCroChannels in BioMediCal aPPliCaTions ..................................................................................................273 Annabel Krebs, Thorsten Knoll, Dominic Nussbaum, Thomas Velten hoT eMBossing of BiodegradaBle PolyMers . ..............................................................................................278 Matthias Worgull, Alexander Kolew, Heilig Markus, Marc Schneider, Heinz Dinglreiter su-8-Based raPid Tooling for TherMal roll eMBossing. .........................................................................279 Khaled Metwally, Laurent Robert, Roland Salut, Chantal Khan Malek MulTi-CoMPonenT hoT eMBossing of MiCro- and nanosysTeMs ............................................................284 Alexander Kolew, Markus Heilig, Karsten Sikora, Daniel Muench, Matthias Worgull INVITED TALK 2: SUCCESS IN MEMS, «FROM DRIE TECHNOLOGY TO SOCIAL INNOVATION» suCCess in MeMs, «froM drie TeChnology To soCial innovaTion» . .......................................................288 Susumu KAMINAGA xi
SESSION C5: APPLICATIONS II BrighTness enhanCeMenT of oleds By using MiCrolens array filM wiTh siliCon oil and ag ParTiCles .......................................................................294 Shan-Shan Hsu, Tung-Yu Chang, Hsiharng Yang, Jen-Sung Hsu inTegraTion of hyBrid oPTiCal filTer wiTh Buried quad Pn-junCTion PhoTodeTeCTor for MulTi-laBeling fluoresCenCe deTeCTion aPPliCaTions. ..................................................................300 Charles Richard, Patrick Pittet, Stéphane Martel, Luc Ouellet, Guo-Neng Lu, Vincent Aimez, Paul G. Charrette faBriCaTion and CharaCTerisTiCs of a fusedsiliCa-Based oPTiCal waveguide wiTh feMToseCond - fiBer laser Pulses ..................................................................................305 Ting-Chou Chang, Chien-Hsing Chen, Wei-Hung Shih, Jian-Neng Wang, Chai-Yu Lee, Jaw-Luen Tang, Shau-Chun Wang, Lai-Kwan Chau, Wei-Te Wu CaPaCiTive MiCroPhone faBriCaTed wiTh CMos-MeMs surfaCe-MiCroMaChining TeChnology .....309 Josué Esteves, Libor Rufer, Gustavo Rehder a novel inTegraTed soluTion for The ConTrol and diagnosis of eleCTrosTaTiC MeMs swiTChes . ....................................................................................................................315 Carlo Trigona, Norbert Dumas, Laurent Latorre, Pascal Nouet an ulTra low Power TeMPeraTure sensor for sMarT PaCkaging MoniToring . ...............................320 Souha Hacine, Frederick Mailly, Norbert Dumas, Laurent Latorre, Pascal Nouet SESSION T5: RELIABILITY, TESTING AND MEASUREMENT aCCuraTe TherMal CharaCTerizaTion of Power seMiConduCTor PaCkages By TherMal siMulaTion and MeasureMenTs . ............................................................................................324 Andras Vass-Varnai, Robin Bornoff, Sandor Ress, Zoltan Sarkany, Sandor Hodossy, Marta Rencz linear energy ConTrol of laser drilling and iTs aPPliCaTion for TfT-lCd BrighT Pixel rePairing .................................................................................................................330 Taco Chen, Ming-Tzer Lin MeasureMenT of eleCTriCal ProPerTies of MaTerials under The oxide layer By MiCrowave-afM ProBe . ......................................................................................................................................334 Lan Zhang, Yang Ju, Atsushi Hosoi, Akifumi Fujimoto aMPliTude enhanCeMenT using viBraTion Mode loCalizaTion wiTh a single MiCro-MeChaniCally CouPled BeaM-shaPed resonaTor array . ................................339 Keisuke Chatani, Dong F. Wang, Tsuyoshi Ikehara, Ryutaro Maeda uniaxial MeChaniCal sTress and nanoindenTaTion To CharaCTerize Thin MulTilayers ...........344 Thibaut Fourcade, Jeremie Dhennin, Xavier Chauffleur, Mikaël Colin, Jean-Michel Desmarres, Joël Alexis eleCTriCal and MeChaniCal CharaCTerizaTion of laTeral neMs swiTChes . ...................................348 R. Hinchet, L. Montès, G. Bouteloup, G. Ardila, R. Parsa, R.T. Howe, H.-S. Philip Wong, K. Akarvardar xii
Page 2 and 3: COLLECTION OF PAPERS PRESENTED AT T
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Page 8 and 9: Table of Contents Wednesday 11 May
Page 10 and 11: PANEL DISCUSSION TEXTILE MICROSYSTE
Page 14 and 15: SPECIAL SESSION OF BIO-MEMS/NEMS a
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Page 24 and 25: suspended membrane can be pulled to
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Page 54 and 55: ! TABLE 3 SUMMARY OF SELECTIVITIES
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The fabrication of optical Cap-Wafe
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the glass is polished down in a cos
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11-13 May 2011, Aix-en-Provence, F
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Fig. 14. Time history of the envelo
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We have reported that how base mode
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We assume that 11-13 May 2011, Aix
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Y X Fig. 1. Scanning electron mic
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10 3 11-13 May 2011, Aix-en-Proven
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Intenstiy (counts/second) Fig. 1. X
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etween x 2 to L (remember that x 2
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piezoelectric displacement transduc
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Figure 7 Displacement conditions of
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protect the corners from undercut.
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A. Continuous domain Starting from
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Fig. 8. Central finite difference m
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700 11-13 May 2011, Aix-en-Provenc
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o o o o o o o o Check applicability
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C. Identification Results The ident
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The proposed solution for this prob
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teen wire segments of a coil, as in
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As the metallization is too reflect
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B. Implemented die overview A die c
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IN CLK OUT Fig. 16. Probe setup for
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adhesive material with 30μm thickn
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B. Dynamics of Energy Flows For a l
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11-13 May, Aix-en-Provence, France
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80˚C. Additionally, we looked into
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The XRD shows a peak above the 2θ
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fibers which define the electric co
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Figure 15. Key board input system.
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ρ = h 2∆α∆T + + E 1h 3 1 +E 2
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In recent years, the pipe flow moni
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As the speed of the rotor increases
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inches silicon wafers which have th
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samples tested in different vacuum
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l c 11-13 May 2011, Aix-en-Provence
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Vp (V) 3,5 3,0 2,5 2,0 1,5 1,0 0,5
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II. MATHEMATICAL MODEL AND NUMERICA
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fluids travel along a curved channe
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measured mixing indices are depicte
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length, which enables them to focus
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however, a rotation for coincidence
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excludes the nature of the fixed bo
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Using the radial and tangential mid
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Now the challenge in data handling
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value of every active channel. Ther
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electrocardiogram. • The heart be
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In our work, we proposed an innovat
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Fig. 8 Concept of the in-home perso
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found that the early-stage diagnosi
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Power monitoring data detected by w
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device consisted of a bimorph canti
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where C others is the capacitance o
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operation, the pressure inside the
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increased. 11-13 May 2011, Aix-en-
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coefficient compatible with the mic
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Variable Description Value Crab-leg
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Membrane weight (mg) Fig. 4. Struct
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So far, the expected major contribu
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al. used a modified LIGA (German ac
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REFERENCES [1] G. Mehta, J. Lee, W.
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followed by titanium (Ti) which sho
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exposure dose, post exposure bake t
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#### ##/&### 3 # #
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*5%6,+/.,-,7-, ,+.,1/21* %
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B. Energy Applications Society is f
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Presently, the microfabrication pro
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[6] C. Richard, A. Renaudin, V. Aim
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NA sinθ c 11-13 May 2011, Aix-en-
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the waveguide on the fused silica,
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microphone diaphragm. The chosen CM
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TABLE V MICROPHONE CHARACTERISTICS
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Figure 7b shows the effect of a par
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over the temperature range (i.e. th
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given. This allows a CTM model to b
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the magic-Tee, and the coherent sig
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After analyzing the two conditions
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IV. MICRO FABRICATION For fabricati
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IV. A. Simulation and Sensitivity A
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grown to sub-confluence were washed
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Clamps rotation [21] Clamps transla
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Layout Total dimensions of the grip
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focusing increased both as the stre
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11-13 May, 2011, Aix-en-Provence,
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Time of diffusion (hr) 1200 1000 80
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Chip Magnet Light source Hot plate
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above, they would move to upward an
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This phenomenon is now reaching the
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C. Proof mass displacement Moreover
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The VerilogA block code is : 11-13
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Author Index Abi-Saab D. 81 Aimez V
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Nussbaum Dominic 273 O’Hara T. 35
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