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Online proceedings - EDA Publishing Association

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11-13 <br />

May 2011, Aix-en-Provence, France<br />

and Nanometer Structures, Vol. 14, No. 1, pp. 242-247, (1996). <br />

[2] Y. Martin, D.W. Abraham and H. K. Wickramasinghe, High-resolution<br />

capacitance measurement and potentiometry by force microscopy, Applied<br />

Physics Letters, Vol. 52, No. 13, pp. 1103-1105, (1988).<br />

[3] M. Nonnenmacher, M.P.O’ Boyle and H.K. Wickramasigh, Kelvin<br />

probe force microscopy, Applied Physics Letters, Vol. 58, No. 25, pp.<br />

2921-2923, (1991).<br />

[4] Y. Martin and H. K. Wickramasinghe, Magnetic imaging by “force<br />

microscopy” with 1000 Å resolution, Applied Physics Letters, Vol. 50, No.<br />

20, pp. 1455-1457, (1987).<br />

[5] M. Petzold, J. Landgraf, M. Füting and J.M. Olaf, Application of atomic<br />

force microscopy for microindentation testing, Thin Solid Films, Vol. 264,<br />

No. 2, pp. 153-158, (1995).<br />

[6] K. Yamanaka and S. Nakano, Ultrasonic atomic force microscopy with<br />

overtone excitation of cantilever, Japanese Journal of Applied Physiscs Part<br />

1, Vol. 35, No. 6B, pp. 3787-3792, (1996).<br />

[7] F. Duewer, C. Gao, I. Takeuchi, and X.D. Xiang, Tip-sample distance<br />

feedback control in a scanning evanescent microwave microscope, Applied<br />

Physics Letters, Vol. 74, No. 18, pp. 2696-2698, (1999).<br />

[8] M. Tabib-Azar and D. Akiwande, Real-time imaging of semiconductor<br />

space-charge regions using high-spatial resolution evanescent microwave<br />

microscope, Review of Scientific Instruments, Vol. 71, No. 3, pp. 1460-1465,<br />

(2000).<br />

[9] Y. Ju, M. Saka and H. abé, NDI of delamination in IC packages using<br />

millimeter-waves, IEEE Transactions on Instrumentation and Measurement,<br />

Vol. 50, No. 4, pp. 1019-1023.<br />

[10] Y. Ju, H. Sato and H. Soyama, Fabrication of the tip of GaAs<br />

microwave probe by wet etching, Proceedings of interPACK2005, Paper No.<br />

73140, CD-ROM (2005).<br />

[11] Y. Ju, T. Kobayashi and H. Soyama, Fabrication of a GaAs microwave<br />

probe used for atomic forcemicroscope, Proceedings of interPACK2007,<br />

Paper No. 33613, CD-ROM (2007).<br />

[12] Y. Ju, T. Kobayashi and H. Soyama, Development of a nanostructural<br />

microwave probe based on GaAs, Microsystem Technologies, Vol. 14, No. 7,<br />

pp. 1021-1025, (2008).<br />

[13] L. S. Liu and Y. Ju, Nondestructive measurement and high-precision<br />

evaluation of the electrical conductivity of doped GaAs wafer using<br />

microwaves, Review of Scientific Instruments, Vol. 81, No. 124701, pp.<br />

124701-1-4, (2010).<br />

338

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