Online proceedings - EDA Publishing Association

Fig. 8 Concept of the in-home personal healthcare system using
piezoelectric MEMS resonator as the ultra-sensitive gas sensor.
III. CONCLUSIONS
Piezoelectric PZT is expected as one of the key
functional materials for MEMS industry. Although much
knowledge is available from state-of-the-art studies for wafer
scale PZT film deposition, etching, characterization, and
large-scale piezoelectric devices fabrication, the mass
production and the commercialization of piezoelectric
MEMS are still complex and difficult at present.
This paper reviewed our recent progress on large area
deposition, fine pattern etching, and low temperature
bonding of PZT thin films for wafer scale fabrication of
piezoelectric MEMS devices from both academic and
technical point of view. The energy dissipation mechanism
in piezoelectric MEMS device and the structure optimization
are also discussed and clarified for the pursuit of better
device performances.
For practical mass production and commercialization,
further works are still undergoing. It includes (1) developing
standard processes for piezoelectric materials fabrication on
8~12-inch wafer; (2) 3D wafer level packaging between
piezoelectric processed wafers and other MEMS processed
wafers for the promotion of large area integration and mass
production; and (3) improving the reliability, stability as well
as performances of the piezoelectric MEMS devices. We will
report the latest results and other details in our following
publications soon.
ACKNOWLEDGMENT
This research is partially supported by the Japan Society
for the Promotion of Science (JSPS) through its “Funding
Program for World-Leading Innovative R&D on Science and
Technology (FIRST Program)."
11-13
May 2011, Aix-en-Provence, France
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