Online proceedings - EDA Publishing Association

high-sensitivity piezoelectric microelectromechanical systems
accelerometers, Journal of Microelectromechanical Systems, 2003, 12,
4: 433-439.
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accelerometer with integrated PZT thin film detectors. Sensors and
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Thomsen E.V.: Analytial model of a PZT thick-film triaxial
acceleromter for optimum design, IEEE Sensor Journal, 2009, 9, 4:
419-429.
[6] Zhu M, Kirby P, Lim MY: Lagrange’s formalism for modeling of a
triaxial microaccelerometer with piezoelectric thin-film sensing,
Sensors Journal, IEEE, 2004; 4, 4: 455 – 463.
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Tri-Axial Microaccelerometer with Piezoelectric Thin-Film Sensing
11-13
May 2011, Aix-en-Provence, France
Using Energy Method, paper accepted, to appear in Journal of
Microsystem Technologies.
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Brief biography of the corresponding author:
Jyh-Cheng Yu graduated from the National Taiwan University,
ROC, in 1985, and received the M.S. and Ph.D. degrees from
the Department of Mechanical Engineering, the Ohio State
University, USA. He now serves as a professor in the
Department of Mechanical and Automation Engineering at
the National Kaohsiung First University of Science and
Technology. His research interests include design and
manufacturing of piezoelectric microsensors, LCD back light
module, and engineering optimization.
Structure Stiffness
Mass /
Moment of Inertia
Open Circuit
s
Sensitivity EI
S
Table 6. Summary of modeling parameters for the tri-axial acceleration sensing
Symmetric
Asymmetric
Torsional
Mode
Mode
Mode
48EI
2
2
3
Y eq
ll )463 12
bb mme llE EIY
eq
qY
( 2 )(
I
K s
bbt
Gtwc
3
Ka
K
3
ts
ww
bm
4
3
l
l
l
l
b
m t,s = m s +4m eq,s
tlEdm
tP
12
a
Sa
2
b
4
JJJ
ya 0,
ae t
q
lltEdzm
t
b
xt 0,
te t
q
b
4
JJJ
3 P 1, b Ps t
3 1,,
bmp p
pa 3 c p 1,,
pb t
2 a
2
S
t
Y eq 33
lK 2
ba
a
wE I
33
mY 33
tEdlzm
2)
96