Online proceedings - EDA Publishing Association

Point-of-care diagnostic
Multi-agent detection capability
In the future there is the potential for use in-vitro and invivo
sensors. In vitro types include the analysis of samples
extracted from the body for determining electrochemistry,
blood pressure and temperature, blood glucose, genetics,
immunology, and toxicology. In vivo sensors measure
biological information inside the body and include catheterbased
biosensor arrays, internal imaging systems, online blood
assays, and neural recording arrays.
[2] http://www.imicronews.com/upload/Rapports/Yole_BioMEMS_Report_Oc
tober_2010_flyer_Web.pdf
[3] Databeans 2010 Medical Semiconductors Report
[4] J.Fernando Alfaro et al, Proc IEEE Engineering in
Medicine & Biology 27 th Conf, 2005
Fig 6 Silicon MEMS sensor to measure biomechanical stresses
(Courtesy of Carnegie Mellon University)
Fig 6 shows an implantable CMOS MEMS sensor
fabricated by researchers at Carnegie Mellon University, using
SPTS’ DRIE processing [4] . Such a sensor could be used to
measure biomechanical stresses in situ, monitoring the strength
of regenerating bone or the interfaces between bone and
prosthetic implants.
IV. CONCLUSIONS
Many MEMS devices like air-bag sensors and ink jet heads
now well-established and are being manufactured in high
volumes. DRIE is a key enabling process for manufacturing
most silicon-based MEMS. Over the past 15 years DRIE
process capability has been continuously improved and
developed, to meet the needs of MEMS manufacturers.
MEMS devices are now finding new, emerging
applications which promise to improve our lives in many other
ways such as environmental monitoring and control, energy
conservation and harvesting, life sciences and security.
V. ACKNOWLEDGEMENTS
The author would like to thank Carolyn Short, Evelyn Tay
and David Butler of SPP Process Technology Systems (SPTS)
for their assistance in the writing of this paper.
REFERENCES
[1] http://www.isuppli.com/MEMS-and-
Sensors/MarketWatch/Pages/New-Consumer-and-Mobile-
MEMS-to-Post-Spectacular-157-Percent-Growth-in-2011.aspx
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