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Online proceedings - EDA Publishing Association

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The oscillator output phase noise calculated from the<br />

Leeson formula is then:<br />

S<br />

2 2<br />

1 ν<br />

0 2 2en<br />

Rm<br />

f ) = 10log([1 ( ) ] )<br />

2<br />

2<br />

(18)<br />

f 2Q<br />

V R<br />

ϕ<br />

( +<br />

2<br />

x f<br />

11-13 May 2011, Aix-en-Provence, France<br />

2. Flicker noise<br />

The flicker_noise function is also added into the<br />

transconductance amplifier plus pin. Flicker noise is directly<br />

visible on the output phase noise. The results are consistent<br />

with the Leeson effect.<br />

IV. CONCLUSION AND FUTURE WORK<br />

As a fundamental result, a MEMS oscillator model has been<br />

developed using the multiphysics Verilog-A language. This<br />

model includes the mechanical and piezoelectric equations,<br />

and the electronic circuitry. This description main asset lies in<br />

allowing the study of critical parameters influencing<br />

performances and especially the phase noise analysis.<br />

This model will be used to compare the influence on phase<br />

noise performances of different types of transduction (optical<br />

and electrostatic…) and other types of oscillator circuits as<br />

PLL oscillator circuit [7]. These values will also be compared<br />

with experimental results obtained with MEMS oscillators.<br />

REFERENCES<br />

[1] O. Le Traon, “The VIA Vibrating Beam Accelerometer: Concept and<br />

Performances”, Proceedings of the PLAN Symposium, 1998.<br />

[2] O. Le Traon, D. Janiaud, M. Pernice, S. Masson, S. Muller, J-Y<br />

Tridera, “A New Quartz Monolithic Differential Vibrating Beam<br />

Accelerometer”, Position, Location, And Navigation Symposium, pp.6-15,<br />

2006<br />

[3] Loreto Rodríguez-Pardo, “Sensitivity, Noise, and Resolution<br />

in QCM Sensors in Liquid Media”, IEEE Sensors Journal, vol.5, n°6, 2005<br />

[4] O. Le Traon, “The VIA Vibrating Beam Accelerometer: Concept and<br />

Performances”, Proceedings of the PLAN Symposium, 1998.<br />

[5] D.B. Leeson “A simple model of feedback oscillator noise spectrum”,<br />

Proceedings of the IEEE, vol. 54, issue 2, p. 329-330, 1966.<br />

[6] E. Rubiola, R. Brendel “A generalization of the Leeson effect”,<br />

arXiv:1004.5539 [physics.ins-det], April 2010.<br />

[7] R. Levy, D. Janiaud, O. Le Traon, S. Muller, JP. Gilles, G. Raynaud,<br />

“A new analog oscillator electronics applied to a piezoelectric<br />

vibrating gyro”, Proceedings of the IEEE Frequency Control Symposium<br />

pp.326-329, 2004<br />

Author Biography:<br />

Guillaume Papin is engineer from the ENSMM since 2010. He is currently a<br />

PhD student at ONERA working on the development of multi-physic models<br />

to improve phase noise performances of vibrating MEMS sensors.<br />

397

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