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characterization, modeling, and design of esd protection circuits

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4.1. Calibration Procedure 101<br />

4.40e. Wafer-level I-V data can be taken at temperatures up to around 500K using a hot<br />

chuck <strong>and</strong> then used as a basis for calibrating model coefficients in high-temperature<br />

simulations. For calibration <strong>of</strong> this AMD technology, however, it is assumed that the<br />

temperature dependences in the mobility <strong>and</strong> II models, which are qualitatively correct<br />

<strong>and</strong> have been fit to high-temperature data <strong>of</strong> other technologies [47,49], are accurate<br />

enough using default coefficient values. The benefit <strong>of</strong> high-temperature calibration is<br />

actually limited because for sub-microsecond ESD events the high-temperature region is<br />

localized--perhaps covering as little as 10 percent <strong>of</strong> the simulation space--<strong>and</strong> thus the<br />

temperature dependence <strong>of</strong> the mobility <strong>and</strong> II models may not have much effect on the<br />

overall I-V curve. Also, these models have only been shown to be valid up to a certain<br />

temperature, e.g., 460K for mobility [47], close to the limit <strong>of</strong> hot-chuck measurements,<br />

but critical ESD effects occur at higher temperatures. And even if the mobility <strong>and</strong> II<br />

models are calibrated at high temperatures, other simulation models are suspect. For<br />

example, at 900K the b<strong>and</strong>-gap shrinkage model predicts a b<strong>and</strong> gap energy about 40mV<br />

higher than the measured value [60]. Instead <strong>of</strong> calibrating mobility <strong>and</strong> II coefficients at<br />

high temperatures to fit ESD thermal-failure simulations, the approach taken here is to<br />

adjust the thermal boundary conditions, i.e., the placement <strong>of</strong> the thermal contacts <strong>and</strong> use<br />

<strong>of</strong> lumped thermal resistors <strong>and</strong> capacitors, to match simulated <strong>and</strong> experimental data.<br />

Since the true thermal boundary conditions are not known exactly, adjusting the thermal<br />

contacts <strong>and</strong> lumped elements to fit simulated thermal failure to ESD data is a reasonable<br />

way to determine their values. Discussion <strong>of</strong> the calibration <strong>of</strong> thermal effects is not taken<br />

up until Section 4.1.4. For all <strong>of</strong> the MOSFET simulations described in this subsection,<br />

the initial lattice temperature is set to 297K <strong>and</strong> is allowed to increase in regions <strong>of</strong> heat<br />

generation (Eq. (3.15)) as determined by the thermal diffusion equation (Eq. (2.2)).<br />

Constant-temperature boundary conditions are placed on the bottom <strong>and</strong> sides <strong>of</strong> the<br />

simulation structures as a simple way <strong>of</strong> <strong>modeling</strong> the large heat sink <strong>of</strong> the bulk silicon,<br />

but these are not really important because the maximum temperature during any <strong>of</strong> the<br />

MOSFET simulations is less than 310K.<br />

Calibration <strong>of</strong> the Lombardi mobility model began with simulations <strong>of</strong> the gate characteristic<br />

shown in Fig. 4.40b. To reduce simulation time, a one-carrier (electron) solution<br />

method was used because hole current is negligible in an NMOS transistor in its normal<br />

operating range. This implies that only the electron mobility coefficients are adjusted during<br />

calibration. Initial simulations <strong>of</strong> the 0.5µm <strong>and</strong> 3.0µm structures using default values

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