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characterization, modeling, and design of esd protection circuits

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4.1. Calibration Procedure 103<br />

After determining the perpendicular-field mobility coefficients by calibrating the gate<br />

characteristic, calibration <strong>of</strong> the drain characteristic was used to set the remaining mobility<br />

coefficients in the bulk mobility term <strong>and</strong> high-field Caughey-Thomas expression (Eq.<br />

(3.24)). Here the advantage <strong>of</strong> doing the gate calibration before the drain calibration<br />

becomes obvious: in the Id-Vds curves the drain voltage is swept to VCC <strong>and</strong> the gate<br />

voltage is stepped to VCC , so E || <strong>and</strong> E⊥ are both high, but since the E⊥ coefficients have<br />

already been determined by the Id-Vgs fit, the optimization space is reduced to variation <strong>of</strong><br />

the E || coefficients. (Actually, a few iterations may need to be performed between gate <strong>and</strong><br />

drain calibrations because the bulk mobility <strong>and</strong> saturation velocity do affect the Id-Vgs curves.) As was the case for the gate-characteristic calibration, hole current is not solved<br />

for in the drain simulations because its contribution is negligible. In initial Id-Vds simulations the saturation current, Idsat , as well as the separation between curves at<br />

different Vgs values (i.e., the transconductance, gm ), were too high for the 0.5µm <strong>and</strong><br />

3.0µm structures. To reduce Idsat , the saturation velocity can be effectively lowered by<br />

reducing βn in the Caughey-Thomas expression. The default value for βn in MEDICI is<br />

2.0, but in this case the default value is too high because it is taken from an old publication<br />

[48]. In a more recent publication, Jacoboni et al. report a βn <strong>of</strong> 1.11 based on a best fit <strong>of</strong><br />

several reported curves <strong>of</strong> drift velocity vs. electric field [62], so the need to reduce βn was<br />

actually expected.<br />

Instead <strong>of</strong> taking a full-factorial approach to the Id-Vds calibration, βn was first individually<br />

optimized in an attempt to create a “quick fix” for Idsat . Using one value for βn , a good<br />

fit could be made for the 0.5µm-gate Idsat <strong>and</strong> gm , but this resulted in too low an Idsat for<br />

the 3.0µm-gate structure. Likewise, a larger value <strong>of</strong> βn resulted in a good fit at 3.0µm, but<br />

Idsat <strong>and</strong> gm are then too high for 0.5µm. Adjusting the bulk mobility does change Idsat <strong>and</strong><br />

gm , but it affects the current <strong>of</strong> both structures proportionately, so µ b could not be used to<br />

remedy the problem. The solution was to adjust βn to calibrate the 3.0µm-gate structure<br />

(the final value <strong>of</strong> βn is nearly equal to the value <strong>of</strong> 1.11 reported by Jacoboni) <strong>and</strong> then<br />

introduce a series source/drain resistance in the structures which effectively reduces Idsat <strong>and</strong> gm by dropping part <strong>of</strong> the drain voltage external to the device. This resistance, added<br />

by defining lumped resistors at the source <strong>and</strong> drain electrodes in the simulations, has a<br />

much larger effect on the 0.5µm structure than the 3.0µm structure because the current<br />

level is much higher for the shorter gate. Using this method, good fits for both drain curves<br />

were attained using a resistance <strong>of</strong> 12.5Ω on the source <strong>and</strong> on the drain. The lumped

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