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Suprem-III User´s Manual
40. Segregation Statement
--------------------------------
The SEGREGAT statement is used to define or modify the impurity segregation coefficient and the impurity
transport coefficient across the interface between two material layers.
SEGREGAT
( ( SILICON
[ 100.FACT= ] [ 110.FACT= ] [ 111.FACT= ]
)
| OXIDE | POLYSILI | NITRIDE | ALUMINUM | AIR
)
( ( /SILICON
[ 100.FACT= ] [ 110.FACT= ] [ 111.FACT= ]
)
| /OXIDE | /POLYSIL | /NITRIDE | /ALUMINU | /AIR
)
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )
[ SEG.0= ] [ SEG.E= ]
[ TRANS.0= ] [ TRANS.E= ]
[ MAX.0= ] [ MAX.E= ]
[ ( MODEL.1 | MODEL.2 ) ]
[ MUI.0= ] [ MUI.E= ]
[ GRATE.0= ] [ GRATE.E= ]
[ C.INIT= ] [ C.THRESH= ] [ L.THICK= ]
Name Type Description
---- ---- -----------
AIR Log Specifies that the material above the interface is the ambient gas.
(unit: )
(default: false.)
(synonym: AMBIENT)
ALUMINUM Log Specifies that the material above the interface is aluminum.
(unit: )
(default: false.)
(synonym: )
ANTIMONY Log Specifies that the coefficients apply to the dopant antimony.
(unit: )
(default: false.)
(synonym: )
ARSENIC Log Specifies that the coefficients apply to the dopant arsenic.
(unit: )
(default: false.)
(synonym: )
BORON Log Specifies that the coefficients apply to the dopant boron.
(unit: )
(default: false.)
(synonym: )