Suprem III - Stanford Technology CAD Home Page

-107-
Suprem-III User´s Manual
42. Solubility Statement
-----------------------------
The SOLUBILITY statement is used to input a table of ordered temperature/solubility pairs. This data is
used by the program to calculate the solid solubility of the various impurities in the materials present in the structure.
SOLUBILITY
FILE= CONC.COL= TEMP.COL=
[ SKIP= ] [ COUNT= ] [ COM.CHAR= ]
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )
( ALUMINUM | NITRIDE | OXIDE | POLYSILICON | SILICON )
Name Type Description
---- ---- -----------
ALUMINUM log Specifies that the solubility data applies to the impurity in the material
aluminum.
(unit: )
(default: false.)
(synonym: )
ANTIMONY log Specifies that the solubility data applies to the dopant antimony.
(unit: )
(default: false.)
(synonym: SB)
ARSENIC log Specifies that the solubility data applies to the dopant arsenic.
(unit: )
(default: false.)
(synonym: AS)
BORON log Specifies that the solubility data applies to the dopant boron.
(unit: )
(default: false.)
(synonym: )
COM.CHAR Char Specifies the comment character for the lines in the file. Any line with
this character in column one is ignored.
(unit: )
(default: *)
(synonym: )
CONC.COL Num Specifies the column in the data file containing the solubility associated
with the corresponding temperature value.
(unit: )
(default: )
(synonym: )
COUNT Num Specifies the number of data points to be input.
(unit: )
(default: Input all every data point.)
(synonym: )