Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
POLYSILI<br />
[ NAME= ] [ DX.DEFAU= ]<br />
[ SEMICOND ]<br />
[ SPECIES= ] [ DENSITY= ]<br />
[ AT.WT.1= ] [ AT.NUM.1= ] [ ABUND.1= ]<br />
[ DIFX.0= ] [ DIFX.E= ]<br />
[ DIMX.0= ] [ DIFM.E= ]<br />
[ DIMMX.0= ] [ DIFMM.E= ]<br />
[ DIFP.0= ] [ DIFP.E= ]<br />
[ NI.0= ] [ NI.E= ] [ NI.F= ] [ DEFECTLN= ]<br />
[ OEDK.0= ] [ OEDK.E= ] [ OED.RATE= ]<br />
[ GSZ.H.0= ] [ GSZ.H.E= ]<br />
[ GSZ.L.0= ] [ GSZ.L.E= ]<br />
[ MIN.GRAI= ] [ TEMP.BRE= ]<br />
[ RATIO.0= ] [ RATIO.E= ]<br />
[ GEO.FACT= ] [ GBE.0= ] [ GBE.E= ]<br />
[ TAU.0= ] [ TAU.E= ]<br />
[ AFFINITY= ] [ EPSILONF= ]<br />
[ N.VALENC= ] [ N.CONDUC= ] [ BAND.GAP= ]<br />
PRINT<br />
[ CONCENTR<br />
[ ACTIVE ] [ CHEMICAL ] [ ALL ] [ TOTAL ] [ NET ]<br />
[ ANTIMONY ] [ ARSENIC ] [ BORON ] [ PHOSPHOR ]<br />
[ XMIN= ] [ XMAX= ]<br />
]<br />
[ IMPURITY<br />
[ ALL<br />
| ( ANTIMONY | ARSENIC | BORON | PHOSPHOR )<br />
]<br />
]<br />
[ MATERIAL<br />
[ ALL<br />
| ( SILICON | POLYSILI | OXIDE | NITRIDE | ALUMINUM )<br />
]<br />
]<br />
[ LAYERS ] [ SEGREGAT ][OXIDATIO ]<br />
[ LINES/PA= ] [ COLUMNS= ]<br />
[ LU= | FILENAME= ]<br />
PROFILE<br />
FILE= CONC.COL= X.COL= [ LAYER= ]<br />
[ SKIP= ] [ COUNT= ] [ COM.CHAR= ]<br />
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )
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