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Suprem-III User´s Manual
37. Profile Statement
--------------------------
The PROFILE statement is used to input an arbitrary impurity profile from a data file. The data must be
stored as two columns, one being the distance from the origin and the other being the concentration at that point.
PROFILE
FILE= CONC.COL= X.COL= [ LAYER= ]
[ SKIP= ] [ COUNT= ] [ COM.CHAR= ]
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )
Name Type Description
---- ---- -----------
ANTIMONY log Specifies that the profile data is for the dopant antimony.
(unit: )
(default: false.)
(synonym: SB)
ARSENIC log Specifies that the profile data is for the dopant arsenic.
(unit: )
(default: false.)
(synonym: AS)
BORON log Specifies that the profile data is for the dopant boron.
(unit: )
(default: false.)
(synonym: )
COM.CHAR Char Specifies the comment character for the lines in the file. Any line with
this character in column one is ignored.
(unit: )
(default: *)
(synonym: )
CONC.COL Num Specifies the column in the file containing the concentration data.
(unit: )
(default: )
(synonym: )
COUNT Num Specifies the number of data points to be input.
(unit: )
(default: Input all data points.)
(synonym: )
LAYER Num Specifies the layer at which the first data point is to be placed.
(unit: )
(default: Topmost layer.)
(synonym: )
PHOSPHOR log Specifies that the profile data is for the dopant phosphorus.
(unit: )
(default: false.)
(synonym: )