Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
37. Profile Statement<br />
--------------------------<br />
The PROFILE statement is used to input an arbitrary impurity profile from a data file. The data must be<br />
stored as two columns, one being the distance from the origin and the other being the concentration at that point.<br />
PROFILE<br />
FILE= CONC.COL= X.COL= [ LAYER= ]<br />
[ SKIP= ] [ COUNT= ] [ COM.CHAR= ]<br />
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )<br />
Name Type Description<br />
---- ---- -----------<br />
ANTIMONY log Specifies that the profile data is for the dopant antimony.<br />
(unit: )<br />
(default: false.)<br />
(synonym: SB)<br />
ARSENIC log Specifies that the profile data is for the dopant arsenic.<br />
(unit: )<br />
(default: false.)<br />
(synonym: AS)<br />
BORON log Specifies that the profile data is for the dopant boron.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
COM.CHAR Char Specifies the comment character for the lines in the file. Any line with<br />
this character in column one is ignored.<br />
(unit: )<br />
(default: *)<br />
(synonym: )<br />
CONC.COL Num Specifies the column in the file containing the concentration data.<br />
(unit: )<br />
(default: )<br />
(synonym: )<br />
COUNT Num Specifies the number of data points to be input.<br />
(unit: )<br />
(default: Input all data points.)<br />
(synonym: )<br />
LAYER Num Specifies the layer at which the first data point is to be placed.<br />
(unit: )<br />
(default: Topmost layer.)<br />
(synonym: )<br />
PHOSPHOR log Specifies that the profile data is for the dopant phosphorus.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )
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