Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
SUPREM-<strong>III</strong> Example 1. NMOS Silicon Gate<br />
Final isolation region processing.<br />
File s3ex1f<br />
Initialize silicon substrate.<br />
Etch polysilicon and oxide over source/drain regions.<br />
Implant Arsenic for source/drain regions.<br />
Drive-in Arsenic and re-oxidize source/drain regions.<br />
Deposit Phosphorus doped SiO2 using CVD.<br />
Reflow glass to smooth surface and dope contact holes.<br />
Deposit Aluminum.<br />
Plot the chemical impurity distributions at this point.<br />
layer material type thickness dx dxmin top bottom orientation<br />
no.<br />
(microns) (microns) node node or grain size<br />
3 ALUMINUM 1.2000 0.0100 0.0010 221 231<br />
2 OXIDE 1.4515 0.0100 0.0010 232 377<br />
1 SILICON 2.6606 0.0100 0.0010 378 500 <br />
Integrated Dopant<br />
layer Net Total<br />
no. active chemical active chemical<br />
3 0.0000e+00 0.0000e+00 0.0000e+00 0.0000e+00<br />
2 0.0000e+00 7.9316e+16 0.0000e+00 7.9329e+16<br />
1 -3.9898e+12 -3.9898e+12 3.9898e+12 3.9898e+12<br />
sum -3.9898e+12 7.9312e+16 3.9898e+12 7.9333e+16<br />
Integrated Dopant<br />
layer PHOSPHORUS ARSENIC<br />
no. active chemical active chemical<br />
3 0.0000e+00 0.0000e+00 0.0000e+00 0.0000e+00<br />
2 0.0000e+00 7.4323e+16 0.0000e+00 5.0000e+15<br />
1 0.0000e+00 0.0000e+00 0.0000e+00 0.0000e+00<br />
sum 0.0000e+00 7.4323e+16 0.0000e+00 5.0000e+15<br />
Integrated Dopant<br />
layer BORON<br />
no. active chemical<br />
3 0.0000e+00 0.0000e+00<br />
2 0.0000e+00 6.6191e+12<br />
1 3.9898e+12 3.9898e+12<br />
sum 3.9898e+12 1.0609e+13<br />
Junction Depths and Integrated Dopant<br />
Concentrations for Each Diffused Region<br />
layer region type junction depth net total<br />
no. no. (microns) active Qd chemical Qd<br />
3 1 n 0.0000 0.0000e+00 0.0000e+00<br />
2 2 n 0.0000 0.0000e+00 7.9325e+16<br />
2 1 p 0.9899 0.0000e+00 3.8242e+12<br />
1 1 p 0.0000 3.9898e+12 3.9898e+12<br />
Save the structure.