Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
IMPLANT<br />
DOSE= ENERGY=<br />
( ANTIMONY | ARSENIC | BF2 | BORON | PHOSPHOR )<br />
( GAUSSIAN<br />
| 2-GAUSSI<br />
| PEARSON<br />
| ( BOLTZMAN [ MINSTEPS= ] [ AT.WT= ] [ AT.NUMB= ] )<br />
)<br />
IMPURITY<br />
INDEX=<br />
[ NAME= ] [ (DONOR | ACCEPTOR) ]<br />
[ AT.WT= ] [ AT.NUMB= ]<br />
[ IONFILE1= ] [ IONFILE2= ]<br />
[ ( ( SILICON<br />
[ FII.0= ] [ FII.E= ]<br />
[ K.MF= ] [ K.A= ] [ K.P= ]<br />
[ MISFITST= ] [ CD= ]<br />
[ MSF111FA= ] [ MSF110FA= ] [ MSF100FA= ]<br />
[ DAMAGEST= ]<br />
[ NE.0= ] [ NE.E= ]<br />
[ ( IMPLANT | CHEMICAL )<br />
[ CTN.0= ] [ CTN.E= ] [ CTN.F= ]<br />
]<br />
)<br />
| ( POLYSILI<br />
[ ENTROPY= ] [ HEAT.SEG= ] [ Q.SITES= ]<br />
[ FII.0= ] [ FII.E= ]<br />
[ ( IMPLANT | CHEMICAL )<br />
[ CTN.0= ] [ CTN.E= ] [ CTN.F= ]<br />
]<br />
)<br />
| ( OXIDE | NITRIDE | ALUMINUM )<br />
[ ELECT.ST= ]<br />
[ DIX.0= ] [ DIX.E= ]<br />
[ DIM.0= ] [ DIM.E= ]<br />
[ DIMM.0= ] [ DIMM.E= ]<br />
[ DIP.0= ] [ DIP.E= ]<br />
]