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Suprem III - Stanford Technology CAD Home Page

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-6-<br />

<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />

9. Aluminum Statement<br />

-----------------------------<br />

The ALUMINUM statement is used to input or modify the characteristics of aluminum as a layer material.<br />

ALUMINUM<br />

[ NAME= ] [ DX.DEFAU= ]<br />

[ CONDUCTO ]<br />

[ SPECIES= ] [ DENSITY= ]<br />

[ AT.WT.1= ] [ AT.NUM.1= ] [ ABUND.1= ]<br />

[ WORK.FUN= ] [ EPSILONF= ]<br />

Name Type Description<br />

---- ---- -----------<br />

ABUND.1 Num The relative abundance of element one in the material. The sum of all<br />

abundances for a material must equal one.<br />

(unit: )<br />

(default: the current value.)<br />

(synonym: )<br />

AT .NUM.1 Num The atomic number of element one in the material.<br />

(unit: )<br />

(default: the current value.)<br />

(synonym: )<br />

AT .WT.1 Num The atomic weight of element one in the material.<br />

(unit: amu)<br />

(default: the current value.)<br />

(synonym: )<br />

CONDUCTO Log Specifies that the material is a conductor.<br />

(unit: )<br />

(default: false.)<br />

(synonym: )<br />

DENSITY Num The density of the material.<br />

(unit: grams/cmˆ3.)<br />

(default: the current value.)<br />

(synonym: )<br />

DX.DEFAU Num The default nominal grid spacing for any layer containing this material.<br />

(unit: microns.)<br />

(default: the current value.)<br />

(synonym: )<br />

EPSILONF Num The dielectric constant of the material relative the dielectric constant of<br />

air.<br />

(unit: )<br />

(default: the current value.)<br />

(synonym: )

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