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Suprem III - Stanford Technology CAD Home Page

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-62-<br />

<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />

DIFM.0 Num The pre-exponential constant used in the calculation the component of<br />

the self-diffusivity due to diffusion with singly negative vacancies.<br />

(unit: micronsˆ2/minute.)<br />

(default: the current value.)<br />

(synonym: )<br />

DIFM.E Num The activation energy used in the calculation the component of the selfdiffusivity<br />

due to diffusion with singly negative vacancies.<br />

(unit: electron volts.)<br />

(default: the current value.)<br />

(synonym: )<br />

DIFMM.0 Num The pre-exponential constant used in the calculation of the component of<br />

the self-diffusivity due to diffusion with doubly negative vacancies.<br />

(unit: micronsˆ2/minute.)<br />

(default: the current value.)<br />

(synonym: )<br />

DIFMM.E Num The activation energy used in the calculation the component of the selfdiffusivity<br />

due to diffusion with doubly negative vacancies.<br />

(unit: electron volts.)<br />

(default: the current value.)<br />

(synonym: )<br />

DIFP.0 Num The pre-exponential constant used in the calculation the component of<br />

the self-diffusivity due to diffusion with positive vacancies.<br />

(unit: micronsˆ2/minute.)<br />

(default: the current value.)<br />

(synonym: )<br />

DIFP.E Num The activation energy used in the calculation the component of the selfdiffusivity<br />

due to diffusion with positive vacancies.<br />

(unit: electron volts.)<br />

(default: the current value.)<br />

(synonym: )<br />

DIFX.0 Num The pre-exponential constant used in the calculation of the component of<br />

the self-diffusivity due to diffusion with neutral vacancies.<br />

(unit: micronsˆ2/minute.)<br />

(default: the current value.)<br />

(synonym: )<br />

DIFX.E Num The activation energy used in the calculation of the component of the<br />

self-diffusivity due to diffusion with neutral vacancies.<br />

(unit: electron volts.)<br />

(default: the current value.)<br />

(synonym: )<br />

DX.DEFAU Num The default nominal grid spacing for any layer containing this material.<br />

(unit: microns.)<br />

(default: the current value.)<br />

(synonym: )<br />

EPSILONF Num The dielectric constant of the material relative the dielectric constant of<br />

air.<br />

(unit: )<br />

(default: the current value.)<br />

(synonym: )

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