Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
26. Initialize Statement<br />
----------------------------<br />
The INITIALIZE statement, as it’s name implies, is used to set up the initial coefficients and structure to<br />
be used in the processing steps that follow.<br />
INITIALIZE<br />
[ ( COEFFICI= | FIRSTIME ) ]<br />
[ STRUCTUR= ] [ MIN.DX= ] [ SAVESTEP ]<br />
[ THICKNES= ] [ DX= ] [ XDX= ] [ SPACES= ]<br />
[ ( SILICON ( | | )<br />
| POLYSILI<br />
( GRAINSIZ= | ( TEMPERAT= [ PRESSURE= ] ) )<br />
| OXIDE<br />
| NITRIDE<br />
| ALUMINUM<br />
)<br />
[ CONCENTR=<br />
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )<br />
]<br />
]<br />
Name Type Description<br />
---- ---- -----------<br />
ALUMINUM Log Specifies that aluminum is the material in the first layer.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
ANTIMONY Log Specified that the initial structure is to be doped uniformly with antimony.<br />
(unit: )<br />
(default: false.)<br />
(synonym: SB)<br />
ARSENIC Log Specifies that the initial structure is to be doped uniformly with arsenic.<br />
(unit: )<br />
(default: false.)<br />
(synonym: AS)<br />
BORON Log Specifies that the initial structure is to be doped uniformly with boron.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
COEFFICI Char The name of the file containing the physical coefficients to be used by the<br />
program.<br />
(unit: )<br />
(default: S3cof0.)<br />
(synonym: )