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Suprem-III User´s Manual
/NITRIDE Log Specifies that the material below the interface is silicon nitride.
(unit: )
(default: false.)
(synonym: )
/OXIDE Log Specifies that the material below the interface is silicon dioxide.
(unit: )
(default: false.)
(synonym: )
/POLYSIL Log Specifies that the material below the interface is polysilicon.
(unit: )
(default: false.)
(synonym: )
/SILICON Log Specifies that the material below the interface is single crystal silicon.
(unit: )
(default: false.)
(synonym: )
100.FACT Num The orientation factor of the impurity’s segregation coefficient for
orientation silicon.
(unit: )
(default: the current value.)
(synonym: )
110.FACT Num The orientation factor of the impurity’s segregation coefficient for
orientation silicon.
(unit: )
(default: the current value.)
(synonym: )
111.FACT Num The orientation factor of the impurity’s segregation coefficient for
orientation silicon.
(unit: )
(default: the current value.)
(synonym: )
The SEGREGAT statement defines those parameters that have to do with transport of impurities across
material interfaces. The impurity type must be specified as well as the the material types on either side of the interface.
The material above the interface is specified simply by name, while the material below the interface is specified
by its name preceded by a slash ‘/’.
Where a parameter or quantity applies to only one side of a given interface, the parameter will apply to the
side with the material that is not preceded by a slach ‘/’.