Suprem III - Stanford Technology CAD Home Page

-92-
Suprem-III User´s Manual
MATERIAL Log Specifies that the coefficient information concerning the specified materials
is to be printed (e.g. band gap, intrinsic carrier concentration coefficients,
electric stopping powers, etc.)
(unit: )
(default: false.)
(synonym: )
NET Log Specifies that the sum of the n-type minus the sum of the p-type active or
chemical impurity concentrations are to be printed.
(unit: )
(default: false.)
(synonym: )
NITRIDE Log Specifies that the material coefficient information for silicon nitride is to
be printed.
(unit: )
(default: false.)
(synonym: )
OXIDATIO Log Specifies that the coefficients that determine the oxidation of silicon,
polysilicon and silicon nitride are to be printed.
(unit: )
(default: false.)
(synonym: )
OXIDE Log Specifies that the material coefficient information for silicon dioxide is to
be printed.
(unit: )
(default: false.)
(synonym: )
PHOSPHOR Log Specifies that the phosphorus concentration, either active or chemical, is
to be printed, or that the phosphorus coefficient information is to be
printed.
(unit: )
(default: false.)
(synonym: )
POLYSILI Log Specifies that the material coefficient information for polysilicon is to be
printed.
(unit: )
(default: false.)
(synonym: )
SEGREGAT Log Specifies that the coefficients that determine the segregation of impurities
across material interfaces are to be printed. The mass transport coefficients
and the volume ratios are also printed.
(unit: )
(default: false.)
(synonym: )
SILICON Log Specifies that the material coefficient information for single crystal silicon
is to be printed.
(unit: )
(default: false.)
(synonym: )