Suprem III - Stanford Technology CAD Home Page

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Suprem-III User´s Manual
INITIALIZE
[ ( COEFFICI= | FIRSTIME ) ]
[ STRUCTUR= ] [ MIN.DX= ] [ SAVESTEP ]
[ THICKNES= ] [ DX= ] [ XDX= ] [ SPACES= ]
[ ( SILICON ( | | )
| POLYSILI
( GRAINSIZ= | ( TEMPERAT= [ PRESSURE= ] ) )
| OXIDE
| NITRIDE
| ALUMINUM
)
[ CONCENTR=
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )
]
]
LOADFILE
FILENAME= ( ALL | COEFFICI | STRUCTUR )
[ FORMATTE ]
PLOT
[ ACTIVE ] [ CHEMICAL ] [ TOTAL ] [ NET ]
[ ANTIMONY ] [ ARSENIC ] [ BORON ] [ PHOSPHOR ]
[ XMIN= ] [ XMAX= ] [ CMIN= ] [ CMAX= ]
[ LINES/PA= ] [ COLUMNS= ]