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Suprem-III User´s Manual
CL.ROW Num The row number in the table of coefficients used to calculate the chlorine
dependence of the oxidation rates.
(unit: )
(default: the current value.)
(synonym: )
CL.TEMPE Num The temperature for which the coefficients in the specified column are
valid.
(unit: degrees Centigrade.)
(default: the current value.)
(synonym: )
DELTA.0 Num The pre-exponential factor of the delta coefficient used in calculating the
impurity concentration dependence of the parabolic oxidation rate.
(unit: cmˆ3/atom.)
(default: the current value.)
(synonym: )
DELTA.E Num The activation energy of the delta coefficient used in calculating the impurity
concentration dependence of the parabolic oxidation rate.
(unit: electron volts.)
(default: the current value.)
(synonym: )
EXP.0 Num The pre-exponential factor of the exponent used in calculating the impurity
concentration dependence of the parabolic oxidation rate.
(unit: )
(default: the current value.)
(synonym: )
EXP.E Num The activation energy of the exponent used in calculating the impurity
concentration dependence of the parabolic oxidation rate.
(unit: electron volts.)
(default: the current value.)
(synonym: )
GAMMA.0 Num The pre-exponential factor of the gamma coefficient used in calculating
the impurity concentration dependence of the linear oxidation rate.
(unit: )
(default: the current value.)
(synonym: )
GAMMA.E Num The activation energy of the gamma coefficient used in calculating the
impurity concentration dependence of the linear oxidation rate.
(unit: electron volts.)
(default: the current value.)
(synonym: )
HCL% Num The default percentage of chlorine present in the ambient.
(unit: percent.)
(default: the current value.)
(synonym: )
LIN.BREA Num The temperature at which the temperature dependence of the linear oxidation
rate changes.
(unit: degrees Centigrade.)
(default: the current value.)
(synonym: )