Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
K.A Num Used in R. Reif’s epitaxial doping model (see reference in EPITAXY<br />
statement). K.a is a thermodynamic constant relating the dopant<br />
species concentration in solid silicon and adsorbed layer.<br />
(unit: centimeters)<br />
(default: the current value.)<br />
(synonym: )<br />
K.MF Num Used in R. Reif’s epitaxial doping model (see reference in EPITAXY<br />
statement). K.mf is a kinetic coefficient controling the rate-limiting<br />
step of the dopant incorporation process.<br />
(unit: centimetersˆ(-2) minutesˆ(-1) atmospheresˆ(-1))<br />
(default: the current value.)<br />
(synonym: )<br />
K.P Num Used in R. Reif’s epitaxial doping model (see reference in EPITAXY<br />
statement). K.p is a thermodynamic constant relating the dopant<br />
species concentration in solid silicon and gas phase.<br />
(unit: centimetersˆ(-3) atmospheresˆ(-1))<br />
(default: the current value.)<br />
(synonym: )<br />
NAME Char The name of the impurity.<br />
(unit: )<br />
(default: the last name specified.)<br />
(synonym: )<br />
NITRIDE Log Specifies that the material dependent parameters apply to boron in silicon<br />
nitride.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
OXIDE Log Specifies that the material dependent parameters apply to boron in silicon<br />
dioxide.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
POLYSILI Log Specifies that the material dependent parameters apply to boron in<br />
polysilicon.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
Q.SITES Num Effective density of segregation sites at a grain boundary.<br />
(unit: sites/cmˆ2.)<br />
(default: the current value.)<br />
(synonym: )<br />
SILICON Log Specifies that the material dependent parameters apply to boron in silicon.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
The BORON statement is an alias for the IMPURITY statement with an index of one and is used to define<br />
or modify the parameters and coefficients associated with boron as an impurity. Not all of the parameters of the
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