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Suprem-III User´s Manual
LIN.H.0 Num The pre-exponential constant of the linear oxidation rate for temperatures
above the breakpoint set by L.BREAKP.
(unit: microns/minute.)
(default: the current value.)
(synonym: )
LIN.H.E Num The activation energy of the linear oxidation rate for temperatures above
the breakpoint set by L.BREAKP.
(unit: electron volts.)
(default: the current value.)
(synonym: )
LIN.L.0 Num The pre-exponential constant of the linear oxidation rate for temperatures
below the breakpoint set by L.BREAKP.
(unit: microns/minute.)
(default: the current value.)
(synonym: )
LIN.L.E Num The activation energy of the linear oxidation rate for temperatures below
the breakpoint set by L.BREAKP.
(unit: electron volts.)
(default: the current value.)
(synonym: )
LIN.PDEP Num The pressure dependence factor for the linear oxidation rate.
(unit: )
(default: the current value.)
(synonym: )
NIOX.0 Num The pre-exponential constant used to determine the oxidation rate of silicon
nitride.
(unit: microns.)
(default: the current value.)
(synonym: )
NIOX.E Num The activation energy used to determine the oxidation rate of silicon nitride.
(unit: electron volts.)
(default: the current value.)
(synonym: )
NIOX.F Num The exponent factor used to determine the oxidation rate of silicon nitride.
(unit: )
(default: the current value.)
(synonym: )
PAR.BREA Num The temperature at which the temperature dependence of the parabolic
oxidation rate changes.
(unit: degrees Centigrade.)
(default: the current value.)
(synonym: )
PAR.H.0 Num The pre-exponential constant of the parabolic oxidation rate for temperatures
above the breakpoint set by P.BREAKP.
(unit: micronsˆ2/minute.)
(default: the current value.)
(synonym: )