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Suprem-III User´s Manual
NITRIDE Log Specifies that the resistivity data applies to the impurity in the material
nitride.
(unit: )
(default: false.)
(synonym: )
OXIDE Log Specifies that the resistivity data applies to the impurity in the material
oxide.
(unit: )
(default: false.)
(synonym: )
PHOSPHOR Log Specifies that the resistivity data applies to the dopant phosphorus.
(unit: )
(default: false.)
(synonym: )
POLYSILI Log Specifies that the resistivity data applies to the impurity in the material
polysilicon.
(unit: )
(default: false.)
(synonym: )
RES.COL Num Specifies the column in the data file containing the resistivities associated
with the corresponding concentration values.
(unit: )
(default: )
(synonym: )
SKIP Num Specifies the number of data points to be skipped on input.
(unit: )
(default: 0)
(synonym: )
SILICON Log Specifies that the resistivity data applies to the impurity in the material
silicon.
(unit: )
(default: false.)
(synonym: )
The RESISTIVITY statement inputs the resistivity vs. concentration data from the specified file and associates
it with one or more impurities in one or more materials. The data files must be organized in columns, with
one column containing the resistivity values and another containing corresponding impurity concentrations. The data
in the columns must be organized such that the concentration values are in increasing order. Comment lines may
appear at any point as long as they are preceded with the comment character in column one.