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Suprem-III User´s Manual
MUI.E Num The activation energy for the chemical potential segregation term.
(unit: electron volts)
(default: the current value.)
(synonym: )
NITRIDE Log Specifies that the material above the interface is silicon nitride.
(unit: )
(default: false.)
(synonym: )
OXIDE Log Specifies that the material above the interface is silicon dioxide.
(unit: )
(default: false.)
(synonym: )
PHOSPHOR Log Specifies that the specified coefficients apply to the dopant phosphorus.
(unit: )
(default: false.)
(synonym: )
POLYSILI Log Specifies that the material above the interface is polysilicon.
(unit: )
(default: false.)
(synonym: )
SEG.0 Num The pre-exponential factor of the segregation coefficient.
(unit: )
(default: the current value.)
(synonym: )
SEG.E Num The activation energy of the segregation coefficient.
(unit: electron volts.)
(default: the current value.)
(synonym: )
SILICON Log Specifies that the material above the interface is single crystal silicon.
(unit: )
(default: false.)
(synonym: )
TRANS.0 Num The pre-exponential factor of the interface transport coefficient.
(unit: microns/minute.)
(default: the current value.)
(synonym: )
TRANS.E Num The activation energy of the interface transport coefficient.
(unit: electron volts.)
(default: the current value.)
(synonym: )
/AIR Log Specifies that the material below the interface is air.
(unit: )
(default: false.)
(synonym: AMBIENT)
/ALUMINU Log Specifies that the material below the interface is aluminum.
(unit: )
(default: false.)
(synonym: )