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Suprem-III User´s Manual
only the cross sections change as the ions cross any interface. When any ion scatters to an energy less than about
5% of the initial energy, or when an ion is scattered back toward the target surface, that ion is considered stopped at
that depth and becomes part of the range distribution. The calculation proceeds until the concentration of the implanted
profile drops to 10ˆ-5 of its peak value.
The other three models are based on fitting the as-implanted distribution to an analytical function. The
three functions available are a simple Gaussian, a two sided Gaussian, or a Pearson type-IV distribution. The necessary
moments, or range statistics, are read from the implant moment data file specified via the appropriate impuritys
statement.