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Suprem-III User´s Manual
SAVESTEP Log Causes the structure to be saved in the file S3sav0 after each step in
which the structure is modified.
(unit: )
(default: false.)
(synonym: )
SILICON Log Specifies that single crystal silicon is the material in the first layer.
(unit: )
(default: false.)
(synonym: )
SPACES Num The number of spaces to be used in the layer.
(unit: )
(default: thickness/dx if no structure is input; otherwise, the current
number of spaces.)
(synonym: )
STRUCTUR Char The name of the file containing the initial structure information.
(unit: )
(default: )
(synonym: )
TEMPERAT Num Specifies the polysilicon deposition temperature.
(unit: degrees Centigrade.)
(default: )
(synonym: )
THICKNES Num The thickness of the first layer of the initial structure.
(unit: microns.)
(default: That of the first layer of the input structure file; otherwise,
none.)
(synonym: )
XDX Num The distance from the top of the first layer at which the nominal grid
spacing applies.
(unit: microns.)
(default: That of the first layer of the input structure file; otherwise, 0.0)
(synonym: )
Log Specifies that the crystalline orientation of the material in the first layer is
.
(unit: )
(default: false.)
(synonym: )
Log Specifies that the crystalline orientation of the material in the first layer is
.
(unit: )
(default: false.)
(synonym: )
Log Specifies that the crystalline orientation of the material in the first layer is
.
(unit: )
(default: false.)
(synonym: )