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Suprem-III User´s Manual
45. Vol.Ratio Statement
-----------------------------
The VOL.RATIO statement is used to set the volume ratio between two materials, where one material
might be converted into the material as in silicon to silicon dioxide.
VOL.RATIO
( SILICON | OXIDE | POLYSILI | NITRIDE | ALUMINUM )
( /SILICON | /OXIDE | /POLYSIL | /NITRIDE | /ALUMINUM )
RATIO=
Name Type Description
---- ---- -----------
ALUMINUM Num Specifies that the constant is the volume ratio of aluminum to the other
material specified.
(unit: )
(default: false.)
(synonym: )
NITRIDE Log Specifies that the constant is the volume ratio of silicon nitride to the other
material specified.
(unit: )
(default: false.)
(synonym: )
OXIDE Log Specifies that the constant is the volume ratio of silicon dioxide to the
other material specified.
(unit: )
(default: false.)
(synonym: )
POLYSILI Log Specifies that the constant is the volume ratio of polycrystalline silicon to
the other material specified.
(unit: )
(default: false.)
(synonym: )
RATIO Num The volume ratio between the materials specified.
(unit: )
(default: the current value.)
(synonym: CONSTANT)
SILICON Log Specifies that the constant is the volume ratio of silicon to the other material
specified.
(unit: )
(default: false.)
(synonym: )
/ALUMINU Log Specifies that the constant is the volume ratio of the other material specified
to aluminum.
(unit: )
(default: false.)
(synonym: )