Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
TOTAL Log Specifies that the sum of all of the active or chemical impurity concentrations<br />
present in the structure is to be printed.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
XMAX Num The distance from the top of the structure to the point where the last concentration<br />
is to be printed.<br />
(unit: microns.)<br />
(default: The current depth of the structure.)<br />
(synonym: )<br />
XMIN Num The distance from the top of the structure to the point where the first concentration<br />
is to be printed.<br />
(unit: microns.)<br />
(default: 0.0)<br />
(synonym: )<br />
The PRINT statement is used to output printed information. This information may consist of structural information<br />
such as junction depths, layer thicknesses or various impurity distributions versus distance in the structure,<br />
or coefficient information such as the coefficients for impurity diffusion or segregation, the oxidation of silicon, or<br />
the atomic number and mass of impurities or materials.<br />
The impurities present may be printed either individually, added together, or as the difference between n-<br />
and p-type dopants. These prints may be of either electrically or total chemical concentrations. If no range is specified,<br />
then the distributions are printed over the entire structure.<br />
Normally the output of the print statement goes to the standard output device (usually the line printer), but<br />
the user may override the output logical unit number by specifying the output lu, or he may direct it into a specified<br />
file.